A SCANNING PROBE MICROSCOPE AND A MEASURING METHOD USING THE SAME

• US 20110055982A1
• Filed: 07/01/2010
• Published: 03/03/2011
• Est. Priority Date: 08/28/2009
• Status: Active Grant

• Current Assignee: Hitachi, Ltd.
• Original Assignee: Hitachi, Ltd.
• Inventors: Baba, Shuichi, Nakata, Toshihiko, WATANABE, Masahiro
• Granted Patent: US 8,353,060 B2
• Time in Patent Office: Days
• US Class Current: 850/2
• CPC Class Codes: G01Q 10/02 Coarse scanning or positioning
• CPC Class Codes: G01Q 10/04 Fine scanning or positioning

Abstract

It is difficult for a scanning probe microscope according to the conventional technology to operate a probe for scanning and positioning in a wide range and for high-precision scanning in a narrow range. A scanning probe microscope according to the invention uses probe driving actuators for coarse adjustment and fine adjustment. For scanning and positioning in a wide range, the coarse adjustment actuator is switched to fast responsiveness. For scanning in a narrow range, the coarse adjustment actuator is switched to slow responsiveness. Instead, positional noise is reduced and the fine adjustment actuator is mainly used for scanning in a narrow range. The probe is capable of not only scanning and positioning in a wide range but also high-precision scanning in a narrow range.

Claims

1. A scanning probe microscope, comprising:

a probe section having a cantilever and a probe fixed near a tip of the cantilever;

probe section drive means for driving the probe section so that the probe scans a specimen surface by repeatedly being close to or in contact with the specimen surface and being apart from the specimen surface;

displacement amount detection means for detecting a displacement amount of the probe section while the probe section drive means driving the probe; and

signal processing means for acquiring shape information about the specimen surface based on the displacement amount of the probe section detected by the displacement amount detection means,

wherein the probe section drive means includes;

a drive section for independently driving the probe in three mutually-perpendicular axis directions; and

a drive speed switch section for switching a drive speed of the drive section at least in one axis direction while the drive section drives the probe section.

2. The scanning probe microscope according to claim 1, wherein the drive speed switch section switches a drive speed in accordance with a travel distance of the probe section at least in the one axis direction.

3. The scanning probe microscope according to claim 1, wherein the displacement amount detection means is configured as a capacitance displacement meter.

4. The scanning probe microscope according to claim 1, wherein the displacement amount detection means is configured as a laser interference displacement meter.

5. The scanning probe microscope according to claim 1,

wherein the drive speed switch section switches the drive speed between high-speed response and low-speed response;

wherein a time constant for the high-speed response ranges from 0.1 to five milliseconds; and

wherein a time constant for the low-speed response ranges from five to 100 milliseconds.

6. The scanning probe microscope according to claim 1,

wherein the probe drive means includes a drive section;

wherein the drive section provides at least one of three mutually-perpendicular axis directions with a drive section that combines a coarse adjustment actuator having a wide range of movement with a fine adjustment actuator having a narrow range of movement for driving the probe; and

wherein the drive speed switch section switches a drive speed for a coarse adjustment actuator in at least one of the three axis directions.

7. The scanning probe microscope according to claim 6, wherein the drive speed switch section switches a drive speed in accordance with a travel distance at least in the one axis direction.

8. A measurement method using a scanning probe microscope, comprising the steps of:

driving a probe section having a cantilever and a probe fixed near a tip of the cantilever so that the probe scans a specimen surface by repeatedly being close to or in contact with the specimen surface and being apart from the specimen surface;

detecting a displacement amount of the probe section scanning the specimen surface; and

acquiring shape information about the specimen surface based on the detected displacement amount of the probe section,

wherein the probe is driven to scan the specimen surface by switching a drive speed in at least one axis direction while driving.

9. The measurement method using a scanning probe microscope according to claim 8, wherein a drive speed at least in the one axis direction is switched correspondingly to a travel distance in the one axis direction.

10. The measurement method using a scanning probe microscope according to claim 8, wherein a capacitance displacement meter detects the displacement amount of the probe section.

11. The measurement method using a scanning probe microscope according to claim 8, wherein a laser interference displacement meter detects the displacement amount of the probe section.

12. The measurement method using a scanning probe microscope according to claim 8,

wherein the drive speed is switched between high-speed response and low-speed response during scan over the specimen surface;

wherein a time constant for the high-speed response ranges from 0.1 to five milliseconds; and

wherein a time constant for the low-speed response ranges from five to 100 milliseconds.

13. The measurement method using a scanning probe microscope according to claim 8, wherein a drive speed at least in the one axis direction is switched for scanning during driving by switching a drive speed of a coarse adjustment actuator having a wide range of movement for driving the probe rather than a fine adjustment actuator having a narrow range of movement for driving the probe.

14. The measurement method using a scanning probe microscope according to claim 13, wherein a drive speed at least in the one axis direction is switched correspondingly to a travel distance in the one axis direction.

15. The measurement method using a scanning probe microscope according to claim 13, wherein a capacitance displacement meter detects the displacement amount of the probe section.

16. The measurement method using a scanning probe microscope according to claim 13, wherein a laser interference displacement meter detects the displacement amount of the probe section.

17. The measurement method using a scanning probe microscope according to claim 13,

wherein the drive speed is switched between high-speed response and low-speed response during scan over the specimen surface;

wherein a time constant for the high-speed response ranges from 0.1 to five milliseconds; and

wherein a time constant for the low-speed response ranges from five to 100 milliseconds.