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Micromechanical system

  • US 20110056295A1
  • Filed: 08/09/2010
  • Published: 03/10/2011
  • Est. Priority Date: 09/04/2009
  • Status: Active Grant
First Claim
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1. A micromechanical sensor, comprising:

  • a substrate;

    a first movable element connected to the substrate by a first spring element; and

    a second movable element connected to the substrate by a second spring element;

    wherein the first movable element and the second movable element are independently movable in relation to the substrate, and wherein the first movable element and the second movable element are situated one above the other perpendicular to the substrate surface in at least some sections.

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