MICROMECHANICAL SYSTEM FOR DETECTING AN ACCELERATION
First Claim
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1. A micromechanical system for detecting an acceleration, comprising:
- a substrate;
a rocker-like mass structure having a first lever arm and a diametrically opposed second lever arm, which are situated tiltably at a distance in relation to the substrate and about an axis of rotation to the substrate; and
first and second electrodes situated on the substrate, each electrode being diametrically opposed to a lever arm,wherein each lever arm includes a section extending from the axis of rotation, the section lying above an intermediate space between the electrodes and the two sections having varying masses.
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Abstract
A micromechanical system for detecting an acceleration includes a substrate, a rocker-like mass structure having a first lever arm and a diametrically opposed second lever arm, the lever arms being situated tiltably at a distance to the substrate and about an axis of rotation to the substrate, and first and second electrodes being provided on the substrate. Each electrode is diametrically opposed to a lever arm and each lever arm includes a section extending from the axis of rotation which is located between the electrodes above an intermediate space. The two sections have different masses.
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9 Claims
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1. A micromechanical system for detecting an acceleration, comprising:
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a substrate; a rocker-like mass structure having a first lever arm and a diametrically opposed second lever arm, which are situated tiltably at a distance in relation to the substrate and about an axis of rotation to the substrate; and first and second electrodes situated on the substrate, each electrode being diametrically opposed to a lever arm, wherein each lever arm includes a section extending from the axis of rotation, the section lying above an intermediate space between the electrodes and the two sections having varying masses. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9)
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Specification