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METHOD FOR TREATING SURFACES, LAMP FOR SAID METHOD, AND IRRADIATION SYSTEM HAVING SAID LAMP

  • US 20110056513A1
  • Filed: 06/05/2008
  • Published: 03/10/2011
  • Est. Priority Date: 06/05/2008
  • Status: Abandoned Application
First Claim
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1. A method for surface treatment, in particular cleaning, modification and/or activation, of an object in the interior of a process chamber (17) with the aid of a UV/VUV radiator (1),the UV/VUV radiator (1) having a radiator vessel (2) that projects into the interior of the process chamber (17),the method comprising the following method steps:

  • introducing into the process chamber (17) the object whose surface is to be treated, in particular cleaned, modified and/or activated,generating UV/VUV radiation by operating the UV/VUV radiator (1), the UV/VUV radiation passing into the interior of the process chamber (17) through the wall of the radiator vessel (2), which wall is transparent to the UV/VUV radiation,characterized by the following additional method step;

    generating a gas discharge in the region of at least a part (7) of the outer wall of the radiator vessel (2).

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