TRANSISTOR AND DISPLAY DEVICE
First Claim
1. A transistor comprising:
- a gate electrode layer;
a gate insulating layer over the gate electrode layer;
an oxide semiconductor layer over the gate insulating layer;
a pair of oxide conductive layers partly overlapping with the oxide semiconductor layer over the gate insulating layer;
a source electrode layer and a drain electrode layer over each of the pair of oxide conductive layers; and
an oxide insulating layer in contact with the oxide semiconductor layer,wherein the pair of oxide conductive layers includes a crystal region.
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Accused Products
Abstract
It is an object to manufacture a highly reliable display device using a thin film transistor having favorable electric characteristics and high reliability as a switching element. In a bottom gate thin film transistor including an amorphous oxide semiconductor, an oxide conductive layer having a crystal region is formed between an oxide semiconductor layer which has been dehydrated or dehydrogenated by heat treatment and each of a source electrode layer and a drain electrode layer which are formed using a metal material. Accordingly, contact resistance between the oxide semiconductor layer and each of the source electrode layer and the drain electrode layer can be reduced; thus, a thin film transistor having favorable electric characteristics and a highly reliable display device using the thin film transistor can be provided.
139 Citations
24 Claims
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1. A transistor comprising:
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a gate electrode layer; a gate insulating layer over the gate electrode layer; an oxide semiconductor layer over the gate insulating layer; a pair of oxide conductive layers partly overlapping with the oxide semiconductor layer over the gate insulating layer; a source electrode layer and a drain electrode layer over each of the pair of oxide conductive layers; and an oxide insulating layer in contact with the oxide semiconductor layer, wherein the pair of oxide conductive layers includes a crystal region. - View Dependent Claims (2, 3, 4, 5, 6)
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7. A transistor comprising:
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a gate electrode layer; a gate insulating layer over the gate electrode layer; a source electrode layer and a drain electrode layer over the gate insulating layer; a pair of oxide conductive layers over the source electrode layer and the drain electrode layer; an oxide semiconductor layer partly overlapping with each of the pair of oxide conductive layers over the gate insulating layer; and an oxide insulating layer in contact with the oxide semiconductor layer, wherein the pair of oxide conductive layers includes a crystal region. - View Dependent Claims (8, 9, 10, 11, 12)
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13. A display device comprising:
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a pixel portion and a driver circuit each including a transistor over one substrate, the transistor comprising; a gate electrode layer over the substrate; a gate insulating layer over the gate electrode layer; an oxide semiconductor layer over the gate insulating layer; a pair of oxide conductive layers partly overlapping with the oxide semiconductor layer over the gate insulating layer; a source electrode layer and a drain electrode layer over each of the pair of oxide conductive layers; and an oxide insulating layer in contact with the oxide semiconductor layer, wherein the pair of oxide conductive layers includes a crystal region. - View Dependent Claims (14, 15, 16, 17, 18)
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19. A display device comprising:
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a pixel portion and a driver circuit each including a transistor over one substrate, the transistor comprising; a gate electrode layer over the substrate; a gate insulating layer over the gate electrode layer; a source electrode layer and a drain electrode layer over the gate insulating layer; a pair of oxide conductive layers over each of the source electrode layer and the drain electrode layer; an oxide semiconductor layer partly overlapping with each of the pair of oxide conductive layer over the gate insulating layer; and an oxide insulating layer in contact with the oxide semiconductor layer, wherein the pair of oxide conductive layers includes a crystal region. - View Dependent Claims (20, 21, 22, 23, 24)
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Specification