SEMICONDUCTOR DEVICES AND METHODS OF FORMING THEREOF
First Claim
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1. A semiconductor device comprising:
- a substrate;
an active layer on the substrate;
a capping layer on the active layer;
source/drain electrodes on the capping layer;
a gate electrode on the active layer; and
a first void region on a first sidewall of the gate electrode and a second void region on a second sidewall facing the first sidewall.
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Abstract
Provided is a semiconductor device. The semiconductor device includes: a substrate; an active layer on the substrate; a capping layer on the active layer; source/drain electrodes on the capping layer; a gate electrode on the active layer; and a first void region on a first sidewall of the gate electrode and a second void region on a second sidewall facing the first sidewall.
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Citations
20 Claims
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1. A semiconductor device comprising:
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a substrate; an active layer on the substrate; a capping layer on the active layer; source/drain electrodes on the capping layer; a gate electrode on the active layer; and a first void region on a first sidewall of the gate electrode and a second void region on a second sidewall facing the first sidewall. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12)
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13. A method of forming a semiconductor device, the method comprising:
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preparing a substrate; sequentially forming an active layer and a capping layer on the substrate; forming source/drain electrodes on the capping layer; forming a first insulation layer on the source/drain electrodes; exposing the capping layer by etching a portion of the first insulation layer; sequentially forming a second and a third insulation layers on the capping layer and the first insulation layer; forming an opening exposing a portion of the second insulation layer by etching a portion of the third insulation layer; forming a first recess exposing the capping layer by etching the second insulation layer through the opening; forming a second recess exposing the active layer by etching the capping layer; and forming in the opening a gate electrode connected to the active layer. - View Dependent Claims (14, 15, 16, 17, 18, 19, 20)
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Specification