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Stable surface wave plasma source

  • US 20110057562A1
  • Filed: 09/08/2009
  • Published: 03/10/2011
  • Est. Priority Date: 09/08/2009
  • Status: Active Grant
First Claim
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1. A surface wave plasma (SWP) source, comprising:

  • an electromagnetic (EM) wave launcher configured to couple EM energy in a desired EM wave mode to a plasma by generating a surface wave on a plasma surface of said EM wave launcher adjacent said plasma, said EM wave launcher comprises a slot antenna having a plurality of slots formed therethrough configured to couple said EM energy from a first region above said slot antenna to a second region below said slot antenna;

    a resonator plate positioned in said second region and having a lower surface of said resonator plate including said plasma surface of the EM wave launcher;

    a first recess configuration formed in said plasma surface, said first recess configuration substantially aligned with a first arrangement of slots in said plurality of slots;

    a second recess configuration formed in said plasma surface, said second recess configuration either partly aligned with a second arrangement of slots in said plurality of slots or not aligned with said second arrangement of slots in said plurality of slots; and

    a power coupling system coupled to said EM wave launcher and configured to provide said EM energy to said EM wave launcher for forming said plasma.

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