CLEANING MODULE AND EUV LITHOGRAPHY DEVICE WITH CLEANING MODULE
First Claim
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1. A cleaning module, comprising:
- a supply for a cleaning gas, anda device configured to excite the cleaning gas and comprising a cold cathode.
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Abstract
A cleaning module for an EUV lithography device with a supply (206) for molecular hydrogen, a heating filament (210) and a line (212) for atomic and/or molecular hydrogen. The line (212) has at least one bend with a bending angle of less than 120 degrees, and has a material on its inner surface which has a low recombination rate for atomic hydrogen. The supply (206) is of flared shape at its end, which faces the heating filament (210). A gentler cleaning of optical elements is achieved with such a cleaning module, or also by exciting a cleaning gas with a cold cathode or a plasma, or by filtering out charged particles via of electrical and/or magnetic fields.
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Citations
37 Claims
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1. A cleaning module, comprising:
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a supply for a cleaning gas, and a device configured to excite the cleaning gas and comprising a cold cathode. - View Dependent Claims (2, 3, 6, 7, 11, 12, 13, 23, 28, 33)
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4. A cleaning module, comprising:
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a supply for a cleaning gas, and a device configured to excite the cleaning gas and comprising a plasma generator. - View Dependent Claims (5)
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8. A cleaning module, comprising:
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a supply for a cleaning gas, and a device configured to excite the cleaning gas with a hot cathode and comprising an outlet for the excited cleaning gas and a source for at least one of an electrical and a magnetic field arranged on an external side of the outlet. - View Dependent Claims (9, 10, 26, 27, 31, 32, 36, 37)
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14. A cleaning module, comprising
a supply for molecular hydrogen, a device configured to generate atomic hydrogen, and a delivery line for at least one of the atomic hydrogen and the molecular hydrogen, wherein the delivery line has at least one bend with a bending angle of less than 120 degrees, wherein the delivery line comprises an inner surface material which has a low recombination rate for atomic hydrogen, and wherein the supply comprises an end of flared shape, which faces the generating device.
Specification