Apparatus and Methods for Cyclical Oxidation and Etching

• US 20110061810A1
• Filed: 03/10/2010
• Published: 03/17/2011
• Est. Priority Date: 09/11/2009
• Status: Abandoned Application

• Current Assignee: Applied Materials Incorporated
• Original Assignee: Applied Materials Incorporated
• Inventors: Hemkar, Manish, Olsen, Christopher S., Ranish, Joseph M., Marin, Jose A., Swenberg, Johanes F., Wang, Anchuan, Hunter, Aaron M., Srinivasan, Swaminathan, Ganguly, Udayan, Scotney-Castle, Matthew D., Tang, Jing, Ingle, Nitin K., Nguyen, Vicky
• Application Number:
  US12/720,957
• Publication Number:
  US 20110061810A1
• Time in Patent Office: Days
• US Class Current: 156/345.27
• CPC Class Codes: H01L 21/0223 formation by oxidation, e.g. oxidation of the substrate
• CPC Class Codes: H01L 21/67109 mainly by convection
• CPC Class Codes: H01L 21/67115 mainly by radiation
• CPC Class Codes: H01L 21/67167 surrounding a central transfer chamber
• CPC Class Codes: H01L 21/6719 characterized by the construction of the processing chambers, e.g. modular processing chambers
• CPC Class Codes: H01L 21/67207 comprising a chamber adapted to a particular process
• CPC Class Codes: H01L 21/68785 characterised by the mechanical construction of the susceptor, stage or support
• CPC Class Codes: H01L 21/76232 of trenches having a shape other than rectangular or V-shape, e.g. rounded corners, oblique or rounded trench walls H01L21/76229 takes precedence
• CPC Class Codes: H10B 41/30 characterised by the memory core region

Abstract

Apparatus and methods for the manufacture of semiconductor devices suitable for narrow pitch applications and methods of fabrication thereof are described herein. Disclosed are various single chambers configured to form and/or shape a material layer by oxidizing a surface of a material layer to form an oxide layer; removing at least some of the oxide layer by an etching process; and cyclically repeating the oxidizing and removing processes until the material layer is formed to a desired shape. In some embodiments, the material layer may be a floating gate of a semiconductor device.

Claims

1. An apparatus for performing a cyclical oxidation and etching process on a material layer, comprising:

a processing chamber a chamber body having a plurality of walls defining a processing region within the processing chamber including a substrate support to hold a substrate having a material layer within the processing region;

a lid assembly disposed on an upper surface of the chamber body, the lid assembly comprising a first electrode and a second electrode that define a plasma cavity therebetween, wherein the second electrode is heated and adapted to heat the substrate;

an oxygen-containing gas supply, an inert gas supply and an etching gas supply in fluid communication with at least one the process chamber and lid assembly to deliver the oxygen-containing gas, the inert gas and the etching gas into one of the process chamber and the lid;

a heating system to heat the substrate within the chamber to a first temperature greater than about 100°

C.;

a cooling system to cool the substrate within the chamber to a second temperature below the first; and

a control system to cycle the substrate within the chamber between the first temperature the second temperature.

2. The apparatus of claim 1, wherein the oxidizing gas is in fluid communication with the lid assembly to form an oxidizing plasma to process the material layer.

3. The apparatus of claim 1, wherein the etching gas is in fluid communication with the lid assembly to form an etching plasma to process the material layer.

4. The apparatus of claim 3, wherein the etching gas includes a fluorine-containing gas.

5. The apparatus of claim 4, wherein the etching gas comprises ammonia and one or more of NH₃NF₃ gas and anhydrous hydrogen fluoride (HF).

6. The apparatus of claim 5, wherein, the substrate support is adapted to move vertically within the chamber body to locate the substrate in a heating position proximate the second electrode during an oxidation process and to locate the substrate in an etch position removed from the second electrode during an etch process.

7. The apparatus of claim 1, wherein the substrate support comprises a receiving surface adapted to support the substrate thereon, wherein the receiving surface is disposed above a shaft coupled to a lift mechanism.

8. The apparatus of claim 7, wherein the lift mechanism is adapted to move the receiving surface vertically within the chamber body to locate the substrate in a heating position proximate the second electrode during an oxidation process and to locate the substrate in an etch position removed from the second electrode during an etch process.

9. The apparatus of claim 8, wherein the substrate support assembly comprises one or more gas passageways that are in fluid communication with the receiving surface at one end thereof, and a purge gas source or vacuum source at a second end thereof.

10. The chamber of claim 9, wherein the receiving surface comprises one or more recessed channels formed on an upper surface thereof.

11. The chamber of claim 8, wherein the shaft comprises one or more embedded gas conduits adapted to deliver one or more fluids to the gas passageways.

12. The apparatus of claim 11, wherein the one or more embedded conduits are adapted to deliver a heating medium to the one or more fluid channels.

13. The apparatus of claim 11, wherein the one or more embedded conduits are adapted to deliver a coolant to the one or more fluid channels.

14. The apparatus of claim 1, wherein the control system, the heating system and the cooling system are configured to cycle between the first temperature and second temperature within a time period of less than about three minutes.

15. The apparatus of claim 1, wherein the cooling system comprises a showerhead disposed in the chamber adjacent the substrate support, the showerhead in communication with a cooling fluid.

16. The apparatus of claim 15, wherein the heating system comprises at least one a light source and a resistive heater.

17. The apparatus of claim 15, wherein the resistive heater is disposed within the substrate support.

18. The apparatus of claim 15, wherein the resistive heater is disposed within the showerhead.

19. The apparatus of claim 1, wherein the heating system includes a light source disposed so that light energy emitted by the light source contacts the material surface at an angle of incidence that optimizes absorption by the material being processed.

20. The apparatus of claim 19, wherein the angle of incidence is at a Brewster angle for the material layer being processed.