Apparatus and Methods for Cyclical Oxidation and Etching

• US 20110061812A1
• Filed: 03/10/2010
• Published: 03/17/2011
• Est. Priority Date: 09/11/2009
• Status: Abandoned Application

• Current Assignee: Applied Materials Incorporated
• Original Assignee: Applied Materials Incorporated
• Inventors: Yokota, Yoshitaka, Hickerson, Stephen C., Marin, Jose A., Newman, Jacob, Balakrishna, Aijit, Olsen, Christopher S., Swenberg, Johanes F., Srinivasan, Swaminathan, Liu, Wei, Ganguly, Udayan, Scotney-Castle, Matthew D., Nguyen, Vicky
• Application Number:
  US12/720,926
• Publication Number:
  US 20110061812A1
• Time in Patent Office: Days
• US Class Current: 156/345.34
• CPC Class Codes: H01L 21/0223 formation by oxidation, e.g. oxidation of the substrate
• CPC Class Codes: H01L 21/67109 mainly by convection
• CPC Class Codes: H01L 21/67115 mainly by radiation
• CPC Class Codes: H01L 21/67167 surrounding a central transfer chamber
• CPC Class Codes: H01L 21/6719 characterized by the construction of the processing chambers, e.g. modular processing chambers
• CPC Class Codes: H01L 21/67207 comprising a chamber adapted to a particular process
• CPC Class Codes: H01L 21/68785 characterised by the mechanical construction of the susceptor, stage or support
• CPC Class Codes: H01L 21/76232 of trenches having a shape other than rectangular or V-shape, e.g. rounded corners, oblique or rounded trench walls H01L21/76229 takes precedence
• CPC Class Codes: H10B 41/30 characterised by the memory core region

Abstract

Apparatus and methods for the manufacture of semiconductor devices suitable for narrow pitch applications and methods of fabrication thereof are described herein. Disclosed are various single chambers configured to form and/or shape a material layer by oxidizing a surface of a material layer to form an oxide layer; removing at least some of the oxide layer by an etching process; and cyclically repeating the oxidizing and removing processes until the material layer is formed to a desired shape. In some embodiments, the material layer may be a floating gate of a semiconductor device.

Claims

1. An apparatus for performing a cyclical oxidation and etching process on a material layer, comprising:

a processing chamber having a plurality of walls defining a processing region within the processing chamber including a substrate support to hold a substrate having a material layer within the processing region;

an oxygen-containing gas supply, an inert gas supply and an etching gas supply in fluid communication with the processing chamber to deliver the oxygen-containing gas, the inert gas and the etching gas into the process chamber;

a plasma source to form a plasma in a plasma generation region inside the chamber and at least one of the oxygen-containing gas and etching gas to energize the gas to form at least one of an oxygen plasma, and an etching plasma to contact the material layer;

a heating system to heat the substrate within the chamber to a first temperature greater than about 100°

C.;

a cooling system to cool the substrate within the chamber to a second temperature below the first temperature; and

a control system to cycle the substrate within the chamber between the first temperature the second temperature.

2. The apparatus of claim 1, wherein the control system, the heating system and the cooling system are configured to cycle between the first temperature and second temperature within a time period of less than about three minutes.

3. The apparatus of claim 1, wherein the cooling system comprises a substrate support including passages for allowing cooling medium to flow therethrough.

4. The apparatus of claim 1, wherein the cooling system comprises a showerhead disposed in the chamber adjacent the substrate support, the showerhead in communication with a cooling fluid.

5. The apparatus of claim 4, wherein the heating system comprises at least one a light source and a resistive heater.

6. The apparatus of claim 5, wherein the resistive heater is disposed within the substrate support.

7. The apparatus of claim 5, wherein the resistive heater is disposed within the showerhead.

8. The apparatus of claim 1 wherein the heating system includes a light source disposed so that light energy emitted by the light source contacts the material surface at an angle of incidence that optimizes absorption by the material being processed.

9. The apparatus of claim 8, wherein the angle of incidence is at a Brewster angle for the material layer being processed.

10. The apparatus of claim 1, wherein the process chamber has a ceiling plasma source comprising a power applicator including a coil disposed over the ceiling the coil coupled through an impedance match network a power source to generate plasma within the plasma generation region.

11. The apparatus of claim 10, wherein the etching gas comprises a fluorine-containing gas and the chamber further comprises a nitrogen gas source in communication with a plasma source.

12. The apparatus of claim 2, wherein the second temperature is in the range of about 200°

C. and 1000°

C.

13. The apparatus of claim 12, wherein the chamber is configured to perform an etch process on a material layer on the substrate, at least a portion of the etch process being performed at the first temperature.

14. The apparatus of claim 13, wherein the etch process comprises a dry etch process and the etching gas comprises a fluorine-containing gas.

15. The apparatus of claim 14, wherein the gas source further includes a nitrogen gas in communication with a plasma source.

16. The apparatus of claim 13, wherein the etching gas is in fluid communication with the plasma source to form an etching plasma.

17. The apparatus of claim 2, wherein the temperature control system includes a cooling system to perform at least a portion of the etching process at a temperature below about 50°

C.

18. The apparatus of claim 17, wherein the cooling system is configured to reduce the temperature of the substrate to a temperature in the range of about 25°

C. to about 35°

C.

19. The apparatus of claim 18, wherein the apparatus is configured to cycle between the first temperature and second temperature in less than about three minutes.

20. The apparatus of claim 1, wherein the apparatus is configured to shape a material layer on the substrate, the material layer having a desired shape with a first width proximate a base of the desired shape that is substantially equivalent to a second width proximate a top of the desired shape, wherein the first and second width of the desired shape is between about 1 to about 30 nanometers.