MICROWAVE INTRODUCING MECHANISM, MICROWAVE PLASMA SOURCE AND MICROWAVE PLASMA PROCESSING APPARATUS

• US 20110061814A1
• Filed: 03/05/2009
• Published: 03/17/2011
• Est. Priority Date: 03/14/2008
• Status: Abandoned Application

• Current Assignee: Tokyo Electron Limited
• Original Assignee: Tokyo Electron Limited
• Inventors: Ikeda, Taro
• Application Number:
  US12/922,243
• Publication Number:
  US 20110061814A1
• Time in Patent Office: Days
• US Class Current: 156/345.41
• CPC Class Codes: H01J 37/32192 Microwave generated discharge H01J37/32357, H01J37/32366, H01J37/32394, H01J37/32403 take precedence
• CPC Class Codes: H01J 37/3222 Antennas
• CPC Class Codes: H01J 37/32256 Tuning means
• CPC Class Codes: H05H 1/46 using applied electromagnetic fields, e.g. high frequency or microwave energy H05H1/26 takes precedence

Abstract

A microwave introducing mechanism 43 includes a cylindrical container 50; an inner conductor 52, coaxially provided in the container 50, a microwave transmission path being defined between the container 50 and the inner conductor 52; a tuner 44 for adjusting an impedance of the microwave transmission path 53; and an antenna section 45 including an antenna 51 for radiating to the chamber a microwave transmitted through the microwave transmission path 53. The tuner 44 includes a pair of slugs 58 made of a dielectric material and movable along the inner conductor 52; an actuator 59 for moving the slugs 58; and a controller 60. The controller 60 controls both the slugs 58 to move together in a range of a ½ wavelength of the microwave and one of the slugs 58 to move in a range of a ¼ wavelength of the microwave with regard to the other slug.

Claims

1. A microwave introducing mechanism used for a microwave plasma source for generating a microwave plasma in a chamber, the mechanism comprising:

a main body container having a cylindrical shape;

an inner conductor, having a cylindrical shape or a rod shape, coaxially provided in the main body container, a microwave transmission path being defined between the main body container and the inner conductor;

a tuner for adjusting an impedance of the microwave transmission path; and

an antenna section including a microwave radiating antenna for radiating to the chamber a microwave transmitted through the microwave transmission path,

wherein the tuner includes a pair of slugs made of a dielectric material, the slugs being movable along the inner conductor;

an actuator for moving the slugs; and

a controller for controlling the movement of the slugs, and

the controller controls the actuator to move both of the slugs together in a range of a ½

wavelength of the microwave while maintaining a same distance between the slugs and to move one of the slugs in a range of a ¼

wavelength of the microwave with regard to the other slug.

2. The microwave introducing mechanism of claim 1, wherein the slugs are made of a high-purity alumina.

3. The microwave introducing mechanism of claim 1, wherein the microwave radiating antenna is a planar slot antenna having slots through which a microwave is radiated.

4. The microwave introducing mechanism of claim 3, wherein the slots have a fan shape.

5. The microwave introducing mechanism of claim 1, wherein the antenna section includes a ceiling plate made of a dielectric material through which the microwave radiated from the antenna passes;

and a wave retardation member provided on an opposite side of the ceiling plate and made of a dielectric material for shortening a wavelength of the microwave transmitted to the antenna.

6. The microwave introducing mechanism of claim 1, wherein the tuner and the antenna constitute a lumped constant circuit.

7. The microwave introducing mechanism of claim 1, wherein the tuner and the antenna serve as a resonator.

8. A microwave introducing mechanism used for a microwave plasma source for generating a microwave plasma in a chamber, the mechanism comprising:

a main body container having a cylindrical shape;

an inner conductor, having a cylindrical shape or a rod shape, coaxially provided in the main body container, a microwave transmission path being defined between the main body container and the inner conductor;

a tuner for adjusting an impedance of the microwave transmission path; and

an antenna section including a microwave radiating antenna for radiating to the chamber a microwave transmitted through the microwave transmission path,

wherein the microwave radiating antenna is a planar slot antenna on which four or more slots for radiating a microwave are uniformly formed,

the tuner includes a pair of slugs made of a dielectric material, the slugs being movable along the inner conductor; and

an actuator for moving the slugs, and

the slugs are made of a high-purity alumina.

9. The microwave introducing mechanism of claim 8, wherein the slots have a fan shape.

10. The microwave introducing mechanism of claim 8, wherein the antenna section includes a ceiling plate made of a dielectric material through which the microwave radiated from the antenna passes;

and a wave retardation member provided on an opposite side of the ceiling plate and made of a dielectric material for shortening a wavelength of the microwave transmitted to the antenna.

11. The microwave introducing mechanism of claim 8, wherein the tuner and the antenna constitute a lumped constant circuit.

12. The microwave introducing mechanism of claim 8, wherein the tuner and the antenna serve as a resonator.

13. A microwave introducing mechanism used for a microwave plasma source for generating a microwave plasma in a chamber, the mechanism comprising:

a main body container having a cylindrical shape;

an inner conductor, having a cylindrical shape or a rod shape, coaxially provided in the main body container, a microwave transmission path being defined between the main body container and the inner conductor;

a tuner for adjusting an impedance of the microwave transmission path; and

an antenna section including a microwave radiating antenna for radiating to the chamber a microwave transmitted through the microwave transmission path,

wherein the microwave radiating antenna is a planar slot antenna on which four or more slots for radiating a microwave are uniformly formed,

the tuner includes a pair of slugs made of a dielectric material, the slugs being movable along the inner conductor;

an actuator for moving the slugs; and

a controller for controlling the movement of the slugs, and

the controller controls the actuator to move both of the slugs together in a range of a ½

wavelength of the microwave while maintaining a same distance between the slugs and to move one of the slugs in a range of a ¼

wavelength of the microwave with regard to the other slug.

14. The microwave introducing mechanism of claim 13, wherein the slots have a fan shape.

15. The microwave introducing mechanism of claim 13, wherein the antenna section includes a ceiling plate made of a dielectric material through which the microwave radiated from the antenna passes;

and a wave retardation member provided on an opposite side of the ceiling plate and made of a dielectric material for shortening a wavelength of the microwave transmitted to the antenna.

16. The microwave introducing mechanism of claim 13, wherein the tuner and the antenna constitute a lumped constant circuit.

17. The microwave introducing mechanism of claim 13, wherein the tuner and the antenna serve as a resonator.

18. A microwave introducing mechanism used for a microwave plasma source for generating a microwave plasma in a chamber, the mechanism comprising:

a main body container having a cylindrical shape;

an inner conductor, having a cylindrical shape or a rod shape, coaxially provided in the main body container, a microwave transmission path being defined between the main body container and the inner conductor;

a tuner for adjusting an impedance of the microwave transmission path; and

an antenna section including a microwave radiating antenna for radiating to the chamber a microwave transmitted through the microwave transmission path,

wherein the microwave radiating antenna is a planar slot antenna on which four or more slots for radiating a microwave are uniformly formed,

the tuner includes a pair of slugs made of a dielectric material, the slugs being movable along the inner conductor;

an actuator for moving the slugs; and

a controller for controlling the movement of the slugs,

the slugs are made of a high-purity alumina, and

the controller controls the actuator to move both of the slugs together in a range of a ½

wavelength of the microwave while maintaining a same distance between the slugs and to move one of the slugs in a range of a ¼

wavelength of the microwave with regard to the other slug.

19. The microwave introducing mechanism of claim 18, wherein the slots have a fan shape.

20. The microwave introducing mechanism of claim 18, wherein the antenna section includes a ceiling plate made of a dielectric material through which the microwave radiated from the antenna passes;

and a wave retardation member provided on an opposite side of the ceiling plate and made of a dielectric material for shortening a wavelength of the microwave transmitted to the antenna.

21. The microwave introducing mechanism of claim 18, wherein the tuner and the antenna constitute a lumped constant circuit.

22. The microwave introducing mechanism of claim 18, wherein the tuner and the antenna serve as a resonator.

23. A microwave plasma source which turns a gas supplied to a chamber into a plasma by introducing a microwave into the chamber, the source comprising:

a microwave generating mechanism for generating a microwave; and

a microwave introducing mechanism for introducing the generated microwave into the chamber,

wherein the introducing mechanism includes a main body container having a cylindrical shape;

an inner conductor, having a cylindrical shape or a rod shape, coaxially provided in the main body container, a microwave transmission path being defined between the main body container and the inner conductor;

a tuner for adjusting an impedance of the microwave transmission path; and

an antenna section including a microwave radiating antenna for radiating to the chamber a microwave transmitted through the microwave transmission path,

wherein the tuner includes a pair of slugs made of a dielectric material, the slugs being movable along the inner conductor;

an actuator for moving the slugs; and

a controller for controlling the movement of the slugs, and

the controller controls the actuator to move both of the slugs together in a range of a ½

wavelength of the microwave while maintaining a same distance between the slugs and to move one of the slugs in a range of a ¼

wavelength of the microwave with regard to the other slug.

24. A microwave plasma source which turns a gas supplied to a chamber into a plasma by introducing a microwave into the chamber, the source comprising:

a microwave generating mechanism for generating a microwave; and

a microwave introducing mechanism for introducing the generated microwave into the chamber,

wherein the introducing mechanism includes a main body container having a cylindrical shape;

an inner conductor, having a cylindrical shape or a rod shape, coaxially provided in the main body container, a microwave transmission path being defined between the main body container and the inner conductor;

a tuner for adjusting an impedance of the microwave transmission path; and

an antenna section including a microwave radiating antenna for radiating to the chamber a microwave transmitted through the microwave transmission path,

wherein the microwave radiating antenna is a planar slot antenna on which four or more slots for radiating a microwave are uniformly formed,

the tuner includes a pair of slugs made of a dielectric material, the slugs being movable along the inner conductor; and

an actuator for moving the slugs, and

the slugs are made of a high-purity alumina.

25. A microwave plasma apparatus which performs a process on a substrate by using a microwave plasma, the apparatus comprising:

a chamber for accommodating therein a target substrate to be processed;

a gas supply unit for supplying a gas into the chamber; and

a microwave plasma source, including a microwave generating mechanism for generating a microwave; and

a microwave introducing mechanism for introducing the generated microwave into the chamber, for turning a gas supplied to the chamber into a plasma by introducing the microwave into the chamber,

wherein the introducing mechanism includes a main body container having a cylindrical shape;

an inner conductor, having a cylindrical shape or a rod shape, coaxially provided in the main body container, a microwave transmission path being defined between the main body container and the inner conductor;

a tuner for adjusting an impedance of the microwave transmission path; and

an antenna section including a microwave radiating antenna for radiating to the chamber a microwave transmitted through the microwave transmission path,

wherein the tuner includes a pair of slugs made of a dielectric material, the slugs being movable along the inner conductor;

an actuator for moving the slugs; and

a controller for controlling the movement of the slugs, and

the controller controls the actuator to move both of the slugs together in a range of a ½

wavelength of the microwave while maintaining a same distance between the slugs and to move one of the slugs in a range of a ¼

wavelength of the microwave with regard to the other slug.

26. A microwave plasma apparatus which performs a process on a substrate by using a microwave plasma, the apparatus comprising:

a chamber for accommodating therein a target substrate to be processed;

a gas supply unit for supplying a gas into the chamber; and

a microwave plasma source, including a microwave generating mechanism for generating a microwave; and

a microwave introducing mechanism for introducing the generated microwave into the chamber, for turning a gas supplied to the chamber into a plasma by introducing the microwave into the chamber,

wherein the introducing mechanism includes a main body container having a cylindrical shape;

an inner conductor, having a cylindrical shape or a rod shape, coaxially provided in the main body container, a microwave transmission path being defined between the main body container and the inner conductor;

a tuner for adjusting an impedance of the microwave transmission path; and

an antenna section including a microwave radiating antenna for radiating to the chamber a microwave transmitted through the microwave transmission path,

wherein the microwave radiating antenna is a planar slot antenna on which four or more slots for radiating a microwave are uniformly formed,

the tuner includes a pair of slugs made of a dielectric material, the slugs being movable along the inner conductor; and

an actuator for moving the slugs, and

the slugs are made of a high-purity alumina.