METHOD OF FABRICATING MICROSCALE OPTICAL STRUCTURES
First Claim
1. A method for manufacturing a microscale optical structure from a wafer, comprising:
- preparing said wafer with coatings of desired optical properties by depositing said coatings on an optically finished surface of said wafer;
mounting said wafer on a supporting base having a releasable medium, with said optically finished surface adjacent said supporting base to protect said optically finished surface;
forming additional surfaces of said optical structure at a desired angle and depth in said wafer using a grinding blade having a cutting face at said angle, said grinding blade being configured to rotate about an axis; and
polishing said additional surfaces of said optical structure by introducing a polishing material onto said wafer and using a polishing means to smooth said additional surfaces.
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Abstract
A method for manufacturing a microscale optical structure from a wafer, including: preparing the wafer with coatings of desired optical properties by depositing the coatings on an optically finished surface of the wafer; mounting the wafer on a supporting base having a releasable medium, with the optically finished surface adjacent the supporting base to protect the optically finished surface; forming additional surfaces of the optical structure at a desired angle and depth using a grinding blade having a cutting face at the angle, the grinding blade being configured to rotate about an axis; and polishing the additional surfaces of the optical structure by introducing a polishing material onto the wafer and using a polishing means to smooth the additional surfaces.
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Citations
15 Claims
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1. A method for manufacturing a microscale optical structure from a wafer, comprising:
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preparing said wafer with coatings of desired optical properties by depositing said coatings on an optically finished surface of said wafer; mounting said wafer on a supporting base having a releasable medium, with said optically finished surface adjacent said supporting base to protect said optically finished surface; forming additional surfaces of said optical structure at a desired angle and depth in said wafer using a grinding blade having a cutting face at said angle, said grinding blade being configured to rotate about an axis; and polishing said additional surfaces of said optical structure by introducing a polishing material onto said wafer and using a polishing means to smooth said additional surfaces. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13)
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14. A method for manufacturing a microscale optical structure from a substrate, comprising:
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mounting said substrate on a supporting base having a releasable medium; cutting an unpolished surface of said optical structure at a desired angle and depth in said wafer using a cutting means oriented at said angle, said cutting means being configured to rotate about an axis; and polishing said unpolished surface of said optical structure by introducing a polishing material onto said wafer and using a polishing means to smooth said unpolished surface.
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15. An apparatus for fabricating microscale optical structures from a wafer, comprising:
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at least one blade mounted to at least one rotating spindle; said at least one blade being a grinding blade having an angled cutting face for cutting a surface of a microscale optical structure at an angle; and a polishing means for polishing said optical structure at said angle; wherein said at least one blade is configured to cut a surface of a substrate at said angle for fabricating microscale optical structures.
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Specification