SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD THEREOF

• US 20110062432A1
• Filed: 09/10/2010
• Published: 03/17/2011
• Est. Priority Date: 09/16/2009
• Status: Abandoned Application

• Current Assignee: Semiconductor Energy Laboratory Co., Ltd.
• Original Assignee: Semiconductor Energy Laboratory Co., Ltd.
• Inventors: Okazaki, Kenichi, Jintyou, Masami, Yamazaki, Shunpei, Maruyama, Hotaka, Oikawa, Yoshiaki, Koyama, Jun, Sakakura, Masayuki
• Application Number:
  US12/879,635
• Publication Number:
  US 20110062432A1
• Time in Patent Office: Days
• US Class Current: 257/43
• CPC Class Codes: H01L 27/1225 with semiconductor materials not belonging to the group IV of the periodic table, e.g. InGaZnO
• CPC Class Codes: H01L 29/7869 having a semiconductor body comprising an oxide semiconductor material, e.g. zinc oxide, copper aluminium oxide, cadmium stannate

Abstract

An object is to realize low power consumption while manufacturing a semiconductor device including a thin film transistor whose parasitic capacitance is reduced. Part of an insulating layer covering the periphery of a gate electrode layer is formed to be thick. Specifically, a stack including a spacer insulating layer and a gate insulating layer is formed. The thick part of the insulating layer covering the periphery of the gate electrode layer reduces parasitic capacitance formed between the gate electrode layer of the thin film transistor and another electrode layer (another wiring layer) overlapping with the gate electrode layer.

Claims

1. A semiconductor device comprising:

a gate electrode layer over a substrate;

an insulating layer which is in contact with a side surface of the gate electrode layer and has a tapered side surface over the gate electrode layer;

over the insulating layer, a gate insulating layer which is thinner than the insulating layer and is in contact with a top surface of the gate electrode layer;

an oxide semiconductor layer over the gate insulating layer;

a source electrode layer and a drain electrode layer over a stack including the insulating layer, the gate insulating layer, and the oxide semiconductor layer; and

an oxide insulating layer in contact with the oxide semiconductor layer, over the source electrode layer and the drain electrode layer.

2. The semiconductor device according to claim 1,

wherein the gate insulating layer has a stacked-layer structure.

3. The semiconductor device according to claim 1,

wherein an aluminum oxide film or a silicon oxide film formed by a sputtering method is used as the oxide insulating layer.

4. The semiconductor device according to claim 1,

wherein the oxide semiconductor layer contains In, Ga and Zn.

5. An electronic device including the semiconductor device according to claim 1,

wherein the electronic device is selected from the group consisting of a television set, a computer, a mobile device, an electronic paper, a game machine and a lighting device.

6. A semiconductor device comprising:

a gate electrode layer over a substrate;

an insulating layer which is in contact with a side surface of the gate electrode layer and has a tapered side surface over the gate electrode layer;

over the insulating layer, a gate insulating layer which is thinner than the insulating layer and is in contact with a top surface of the gate electrode layer;

an oxide semiconductor layer over the gate insulating layer;

a source electrode layer and a drain electrode layer over the oxide semiconductor layer; and

an oxide insulating layer in contact with a side surface of the oxide semiconductor layer, over the source electrode layer and the drain electrode layer.

7. The semiconductor device according to claim 6,

wherein the gate insulating layer has a stacked-layer structure.

8. The semiconductor device according to claim 6,

wherein an aluminum oxide film or a silicon oxide film formed by a sputtering method is used as the oxide insulating layer.

9. The semiconductor device according to claim 6,

wherein the oxide semiconductor layer contains In, Ga and Zn.

10. An electronic device including the semiconductor device according to claim 6,

wherein the electronic device is selected from the group consisting of a television set, a computer, a mobile device, an electronic paper, a game machine and a lighting device.

11. A method for manufacturing a semiconductor device, comprising the steps of:

forming a gate electrode layer over a substrate,

forming an insulating film covering the gate electrode layer,

forming an insulating layer covering a side surface of the gate electrode layer, by forming an opening reaching a top surface of the gate electrode layer through selective etching of the insulating film,

over the insulating layer, forming a gate insulating layer which is thinner than the insulating layer and is in contact with the top surface of the gate electrode layer,

forming an oxide semiconductor layer over the gate insulating layer,

forming a source electrode layer and a drain electrode layer over a stack including the insulating layer, the gate insulating layer, and the oxide semiconductor layer, and

forming an oxide insulating layer in contact with the oxide semiconductor layer, over the source electrode layer and the drain electrode layer.

12. The method for manufacturing a semiconductor device according to claim 11,

wherein the insulating film is formed using a film formation apparatus which is different from a film formation apparatus used for forming the gate insulating layer, and

wherein the gate insulating layer is formed using a high-density plasma apparatus.

13. The method for manufacturing a semiconductor device according to claim 11,

wherein the gate insulating layer has a stacked-layer structure.

14. The method for manufacturing a semiconductor device according to claim 11,

wherein an aluminum oxide film or a silicon oxide film formed by a sputtering method is used as the oxide insulating layer.

15. The method for manufacturing a semiconductor device according to claim 11,

wherein the oxide semiconductor layer contains In, Ga and Zn.

16. An electronic device including the semiconductor device according to claim 11,

wherein the electronic device is selected from the group consisting of a television set, a computer, a mobile device, an electronic paper, a game machine and a lighting device.