SENSOR ARRAY AND A METHOD OF MANUFACTURING THE SAME
First Claim
1. A sensor array for detecting particles, the sensor array comprisinga substrate having a plurality of holes;
- a plurality of electronic sensor chips each having a sensor active region being sensitive to the presence of particles to be detected;
an electric contacting structure adapted for electrically contacting the plurality of electronic sensor chips;
wherein at least one of the plurality of electronic sensor chips and the electric contacting structure are connected to the substrate so that the plurality of holes in combination with at least one of the plurality of electronic sensor chips and the electric contacting structure form a plurality of wells with integrated particle sensors.
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0 Petitions
Accused Products
Abstract
A sensor array (100) for detecting particles, the sensor array (100) comprising a substrate (102) having a plurality of holes (104), a plurality of electronic sensor chips (106) each having a sensor active region (202) being sensitive to the presence of particles to be detected, and an electric contacting structure (110) adapted for electrically contacting the plurality of electronic sensor chips (106), wherein the plurality of electronic sensor chips (106) and/or the electric contacting structure (110) are connected to the substrate (102) in such a manner that the plurality of holes (104) in combination with the plurality of electronic sensor chips (106) and/or the electric contacting structure (110) form a plurality of wells with integrated particle sensors.
13 Citations
19 Claims
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1. A sensor array for detecting particles, the sensor array comprising
a substrate having a plurality of holes; -
a plurality of electronic sensor chips each having a sensor active region being sensitive to the presence of particles to be detected; an electric contacting structure adapted for electrically contacting the plurality of electronic sensor chips; wherein at least one of the plurality of electronic sensor chips and the electric contacting structure are connected to the substrate so that the plurality of holes in combination with at least one of the plurality of electronic sensor chips and the electric contacting structure form a plurality of wells with integrated particle sensors. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15)
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16. A method of manufacturing a sensor array for detecting particles, the method comprising;
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providing a substrate having a plurality of holes; providing a plurality of electronic sensor chips each having a sensor active region being sensitive to the presence of particles to be detected; providing an electric contacting structure adapted for electrically contacting the plurality of electronic sensor chips; connecting at least one of the plurality of electronic sensor chips and the electric contacting structure to the substrate so that the plurality of holes in combination with at least one of the plurality of electronic sensor chips and the electric contacting structure form a plurality of wells with integrated particle sensors. - View Dependent Claims (17, 18, 19)
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Specification