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METHOD OF DETERMINING A SENSITIVITY OF A BIOSENSOR ARRANGEMENT, AND BIOSENSOR SENSITIVITY DETERMINING SYSTEM

  • US 20110062972A1
  • Filed: 09/09/2010
  • Published: 03/17/2011
  • Est. Priority Date: 09/11/2009
  • Status: Active Grant
First Claim
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1. A method of determining/adjusting the sensitivity of a biosensor arrangement comprising at least one field effect biosensor, each of the at least one field effect biosensor comprising:

  • a semiconductor substrate comprising a source region, a drain region and a channel region disposed between the source region and the drain region;

    a gate isolation layer covering the channel region; and

    a reference electrode disposed over the gate isolation layer such that a electrolytic solution to be sensed can be provided between the reference electrode and the gate isolation layer,the method comprising the following processes carried out for each field effect biosensor;

    providing an electrolytic solution between the reference electrode and the gate isolation layer;

    applying a source/drain voltage between the source region and the drain region;

    varying a reference voltage supplied to the reference electrode over a voltage range;

    measuring a resulting drain current while varying the reference voltage in order to obtain a corresponding drain current function; and

    determining the sensitivity of the field effect biosensor based on the reference voltage supplied to the reference electrode and the corresponding drain current function.

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