COMMON LASER MODULE FOR A PHOTOVOLTAIC PRODUCTION LINE

• US 20110065227A1
• Filed: 09/15/2009
• Published: 03/17/2011
• Est. Priority Date: 09/15/2009
• Status: Abandoned Application

• Current Assignee: Applied Materials Incorporated
• Original Assignee: Applied Materials Incorporated
• Inventors: Morishige, David, Tanner, David, Su, Tzay-Fa, Eberspacher, Chris
• Application Number:
  US12/559,838
• Publication Number:
  US 20110065227A1
• Time in Patent Office: Days
• US Class Current: 438/68
• CPC Class Codes: B23K 26/364 for making a groove or trench, e.g. for scribing a break initiation groove
• CPC Class Codes: H01L 31/046 PV modules composed of a plurality of thin film solar cells deposited on the same substrate
• CPC Class Codes: H01L 31/0463 characterised by special patterning methods to connect the PV cells in a module, e.g. laser cutting of the conductive or active layers
• CPC Class Codes: H01L 31/18 Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof
• CPC Class Codes: Y02E 10/50 Photovoltaic [PV] energy

Abstract

Embodiments of the present invention generally relate to an automated production line using a common laser scribe module for providing consistent scribe lines in multiple layers during the formation of thin film photovoltaic modules. The common laser scribe module includes a plurality of identical, programmable laser tools configured to emit radiation at a common wavelength. Substrates flowing through the production line are tracked by a system controller, which identifies available laser tools within the common laser scribe module and routes substrates to available tools for scribing features in one or more layers disposed on the substrates. The system controller also sets and controls laser parameters, such as power, pulse frequency, pulse width, and laser pattern, in order to accurately and consistently produce scribed lines in the appropriate material layer of the substrate.

Claims

1. A laser scribe module for scribing a series of trenches in multiple material layers, including at least a front contact layer, a photovoltaic layer, and a back contact layer, deposited on a substrate, comprising:

an automation device configured to receive and transport the substrate within the module;

one or more reading devices configured to scan a unique reference designator assigned to the substrate;

a plurality of laser scribing tools, each configured to emit radiation at substantially the same wavelength; and

a system controller configured to receive information from the one or more reading devices, identify the material layer needing to be scribed, send commands to the automation device to transport the substrate to one of the plurality of laser scribing tools, and configure parameters of the laser scribing tool for scribing the identified material layer.

2. The laser scribe module of claim 1, wherein the wavelength is between about 510 nm and about 560 nm.

3. The laser scribe module of claim 2, wherein the parameters comprise at least a laser pulse frequency.

4. The laser scribe module of claim 3, wherein the material layer identified is a front contact layer and the laser pulse frequency is at least about 300 kHz.

5. The laser scribe module of claim 4, wherein the front contact layer is a transparent conducting oxide layer.

6. The laser scribe module of claim 3, wherein the material layer identified is a photovoltaic layer and the laser pulse frequency is between about 15 kHz and about 30 kHz.

7. The laser scribe module of claim 3, wherein the material layer identified is a back contact layer and the laser pulse frequency is between about 15 kHz and about 30 kHz.

8. The laser scribe module of claim 2, wherein each laser scribing tool comprises a fiber based pulse amplifier laser.

9. A process for scribing lines in multiple layers of a solar cell device, comprising:

receiving a substrate having one or more material layers disposed thereon into a laser scribe module, wherein the laser scribe has a plurality of laser scribe tools disposed therein, each laser scribe tool configured to emit radiation at substantially the same wavelength;

transferring the substrate to an available laser scribe tool via an automation device and a system controller;

setting parameters of the available laser scribe tool based on a top material layer disposed on the substrate via the system controller, wherein the top material layer is selected from the list consisting of a front contact layer, a photovoltaic layer, and a back contact layer; and

scribing a series of lines into the top material layer via the available laser scribe tool and the system controller.

10. The process of claim 9, wherein the wavelength is between about 510 nm and about 560 nm.

11. The process of claim 10, wherein the parameters include at least a laser pulse frequency.

12. The process of claim 11, wherein the top layer is a front contact layer and the laser pulse frequency is at least about 300 kHz.

13. The process of claim 11, wherein the top layer is a photovoltaic layer and the laser pulse frequency is between about 15 kW and about 30 kW.

14. The process of claim 11, wherein the top layer is a back contact layer and the laser pulse frequency is between about 15 kW and about 30 kW.

15. A system for fabricating solar cell modules, comprising:

a loading module configured to receive a substrate having a front contact layer disposed thereon;

a first processing module configured to receive the substrate having the front contact layer disposed thereon with a series of trenches scribed through the front contact layer and deposit a photovoltaic layer over the scribed front contact layer;

a second processing module configured to receive the substrate having the photovoltaic layer disposed thereon with a series of trenches scribed through the photovoltaic layer and deposit a back contact layer over the scribed photovoltaic layer;

a common laser module having a plurality of laser tools for scribing the series of lines in each layer deposited on the substrate, wherein each laser tool is configured to emit radiation at substantially the same wavelength; and

a system controller configured to set and control parameters of each of the laser tools based on the top layer deposited on the substrate needing to be scribed.

16. The system of claim 15, wherein the wavelength is between about 510 and about 560.

17. The system of claim 16, wherein the parameters include at least a laser pulse frequency.

18. The system of claim 17, wherein the top layer is the front contact layer and the laser pulse frequency is at least 300 kHz.

19. The system of claim 17, wherein the top layer is the photovoltaic layer and the laser pulse frequency is between about 15 kW and about 30 kW.

20. The system of claim 17, wherein the top layer is the back contact layer and the laser pulse frequency is between about 15 kW and about 30 kW.

21. The system of claim 17, wherein the common laser module is configured to receive the substrate from the loading module, the first processing module, and the second processing module, and wherein the system controller is configured to determine the top layer on the substrate needing to be scribed based on the processing module from which the substrate is received.

22. The system of claim 17, further comprising one or more reading devices configured to scan a unique reference designator assigned to the substrate, wherein the system controller is configured to receive information from the one or more reading devices, identify the top material layer needing to be scribed, select an available laser scribing tool, and configure the parameters of the laser scribing tool for scribing the identified top material layer.

23. A process for fabricating solar cell modules, comprising:

receiving a substrate having a transparent conducting oxide layer deposited thereon into a common laser module having a plurality of laser scribing tools, wherein each laser scribing tool is configured to emit radiation at substantially the same wavelength;

transferring the substrate to a first available laser scribing tool via an automation device and a system controller;

setting at least a laser pulse frequency of the first available laser scribing tool via the system controller;

scribing a series of trenches through the transparent conducting oxide layer;

transferring the substrate into a first processing module having at least one cluster tool with at least one chamber via the automation device;

depositing one or more photovoltaic layers over the scribed transparent conducting oxide layer;

transferring the substrate having the one or more photovoltaic layers disposed thereon to a second available laser scribing tool within the common laser module via the automation device;

setting at least a laser pulse frequency of the second available laser scribing tool via the system controller;

scribing a series of trenches through the one or more photovoltaic layers;

transferring the substrate into a second processing module having at least one deposition chamber;

depositing a back contact layer over the scribed photovoltaic layers;

transferring the substrate having the back contact layer deposited thereon to a third available laser scribing tool within the common laser module via the automation device;

setting at least a laser pulse frequency of the third available laser scribing tool via the system controller; and

scribing a series of trenches through the back contact layer.

24. The process of claim 23, wherein the wavelength is between about 510 nm and about 560 nm.

25. The process of claim 24, wherein the laser pulse frequency of the first available laser scribing tool is set at least about 300 kHz, wherein the laser pulse frequency of the second available laser scribing tool is set between about 15 kHz and about 30 kHz, and wherein the laser pulse frequency of the third available laser scribing tool is set between about 15 kHz and about 30 kHz.