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SHAPE MEASURING APPARATUS

  • US 20110066400A1
  • Filed: 09/09/2010
  • Published: 03/17/2011
  • Est. Priority Date: 09/15/2009
  • Status: Active Grant
First Claim
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1. A shape measuring apparatus comprising:

  • a probe having a gauge head configured to contact a measured object, the probe configured to move the gauge head within a predetermined area;

    a mover configured to move the probe; and

    a controller configured to control the mover, wherein;

    a shape of the measured object is measured by moving the gauge head along a surface of the measured object while the gauge head is pressed against the measured object, andthe controller comprises;

    a contact point obtainer configured to obtain a contact point location of the surface of the measured object and the gauge head; and

    a motion commander configured to calculate, based on the contact point location, a location command value causing the mover to move the probe.

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