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SEMICONDUCTOR DEVICE

  • US 20110068334A1
  • Filed: 09/22/2010
  • Published: 03/24/2011
  • Est. Priority Date: 09/24/2009
  • Status: Active Grant
First Claim
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1. A semiconductor device comprising:

  • a substrate;

    a driver circuit portion over the substrate, the driver circuit portion including a driver circuit thin film transistor;

    a pixel portion over the substrate, the pixel portion including a pixel thin film transistor;

    a first counter electrode layer over the pixel portion with a liquid crystal layer interposed between the pixel portion and the first counter electrode layer; and

    a second counter electrode layer over the driver circuit portion with the liquid crystal layer interposed between the driver circuit portion and the second counter electrode layer,wherein the pixel thin film transistor and the driver circuit thin film transistor each include;

    a gate electrode layer;

    a gate insulating layer over the gate electrode layer;

    an oxide semiconductor layer over the gate insulating layer;

    a source electrode layer and a drain electrode layer over the oxide semiconductor layer; and

    an oxide insulating layer over the oxide semiconductor layer, the source electrode layer, and the drain electrode layer, the oxide insulating layer being in contact with part of the oxide semiconductor layer.

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