SUBSTRATE SYMMETRICAL SILICIDE SOURCE/DRAIN SURROUNDING GATE TRANSISTOR
First Claim
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1. A transistor comprising:
- a first terminal comprising a first silicide element on a semiconductor body comprising silicon;
a second terminal overlying the first terminal and comprising a second silicide element;
a channel region separating the first and second terminals;
a gate terminal having an inside surface surrounding the channel region; and
a dielectric separating the channel region from the gate terminal.
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Abstract
Field effect transistors described herein include first and second terminals vertically separated by a channel region. The first and second terminals comprise first and second silicide elements respectively. The first silicide element prevents the migration of carriers from the first terminal into the underlying semiconductor body or adjacent devices which can activate parasitic devices. The first silicide element is also capable of acting as a low resistance conductive line for interconnecting devices or elements. The second silicide element provides a low resistance contact between the second terminal and overlying elements.
42 Citations
20 Claims
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1. A transistor comprising:
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a first terminal comprising a first silicide element on a semiconductor body comprising silicon; a second terminal overlying the first terminal and comprising a second silicide element; a channel region separating the first and second terminals; a gate terminal having an inside surface surrounding the channel region; and a dielectric separating the channel region from the gate terminal. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10)
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11. A method for manufacturing a transistor, the method comprising:
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providing a semiconductor body comprising silicon; forming a first terminal on the semiconductor body, a second terminal overlying the first terminal, and a channel region separating the first and second terminals, wherein forming the first terminal comprises forming a first silicide element in the semiconductor body and separating the channel region from an underlying portion of the semiconductor body; forming a gate terminal having an inside surface surrounding the channel region; and forming a dielectric separating the channel region from the gate terminal. - View Dependent Claims (12, 13, 14, 15, 16, 17, 18, 19, 20)
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Specification