NITRIDE SEMICONDUCTOR SUBSTRATE, SEMICONDUCTOR DEVICE, AND METHODS FOR MANUFACTURING NITRIDE SEMICONDUCTOR SUBSTRATE AND SEMICONDUCTOR DEVICE
First Claim
1. A nitride semiconductor substrate comprising:
- a main surface inclined at an angle of 71°
or more and 79°
or less with respect to a (0001) plane toward a [1-100] direction or inclined at an angle of 71°
or more and 79°
or less with respect to a (000-1) plane toward a [−
1100] direction; and
a chamfered portion located at an edge of an outer periphery of said main surface,said chamfered portion being inclined at an angle of 5°
or more and 45°
or less with respect to adjacent one of said main surface and a backside surface on a side opposite to said main surface.
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Accused Products
Abstract
A nitride semiconductor substrate having a main surface serving as a semipolar plane and provided with a chamfered portion capable of effectively preventing cracking and chipping, a semiconductor device fabricated using the nitride semiconductor substrate, and a method for manufacturing the nitride semiconductor substrate and the semiconductor device are provided. The nitride semiconductor substrate includes a main surface inclined at an angle of 71° or more and 79° or less with respect to the (0001) plane toward the [1-100] direction or inclined at an angle of 71° or more and 79° or less with respect to the (000-1) plane toward the [−1100] direction; and a chamfered portion located at an edge of an outer periphery of the main surface. The chamfered portion is inclined at an angle θ1 or θ2 of 5° or more and 45° or less with respect to adjacent one of the main surface and a backside surface on a side opposite to the main surface. Accordingly, cracking and chipping occurring from the edge of the outer periphery of the nitride semiconductor substrate can be effectively suppressed.
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Citations
7 Claims
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1. A nitride semiconductor substrate comprising:
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a main surface inclined at an angle of 71°
or more and 79°
or less with respect to a (0001) plane toward a [1-100] direction or inclined at an angle of 71°
or more and 79°
or less with respect to a (000-1) plane toward a [−
1100] direction; anda chamfered portion located at an edge of an outer periphery of said main surface, said chamfered portion being inclined at an angle of 5°
or more and 45°
or less with respect to adjacent one of said main surface and a backside surface on a side opposite to said main surface. - View Dependent Claims (2, 3, 4, 5)
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6. A method for manufacturing a nitride semiconductor substrate, comprising the steps of:
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preparing a nitride semiconductor substrate having a main surface inclined at an angle of 71°
or more and 79°
or less with respect to a (0001) plane toward a [1-100] direction or inclined at an angle of 71°
or more and 79°
or less with respect to a (000-1) plane toward a [−
1100] direction; andchamfering an edge of an outer periphery of said main surface of said nitride semiconductor substrate, said step of chamfering the edge includes the step of forming a chamfered portion inclined at an angle of 5°
or more and 45°
or less with respect to adjacent one of said main surface and a backside surface on a side opposite to said main surface. - View Dependent Claims (7)
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Specification