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INSPECTION DEVICE AND INSPECTING METHOD FOR SPATIAL LIGHT MODULATOR, ILLUMINATION OPTICAL SYSTEM, METHOD FOR ADJUSTING THE ILLUMINATION OPTICAL SYSTEM, EXPOSURE APPARATUS, AND DEVICE MANUFACTURING METHOD

  • US 20110069305A1
  • Filed: 11/22/2010
  • Published: 03/24/2011
  • Est. Priority Date: 05/28/2008
  • Status: Active Grant
First Claim
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1. An inspection device for inspecting a spatial light modulator having a plurality of optical elements arrayed two-dimensionally and controlled individually, said inspection device comprising:

  • a conjugate optical system which is arranged optically downstream the spatial light modulator and which forms a conjugate plane optically conjugate with an array plane where the plurality of optical elements are arrayed;

    a photodetector having a detection surface arranged on or near the conjugate plane; and

    an inspection unit which inspects optical characteristics of the plurality of optical elements, based on a result of detection by the photodetector.

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