LASER ABLATION TOOLING VIA DISTRIBUTED PATTERNED MASKS
First Claim
1. A distributed patterned mask for use in imaging a laser onto a substrate, comprising:
- a mask having apertures for transmission of light and non-transmissive areas around the apertures, wherein the apertures collectively form a distributed portion of a complete pattern, and wherein when the apertures in the mask are repeatedly imaged onto the substrate, structures within the distributed portion merge within different areas of the imaged pattern to create the complete pattern on the substrate with distributed stitch lines.
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Abstract
A distributed patterned mask for use in a laser ablation process to image a complete pattern onto a substrate. The mask has a plurality of apertures for transmission of light and non-transmissive areas around the apertures. When the apertures for the distributed pattern are repeatedly imaged on a substrate, structures within the distributed pattern merge within different areas of the imaged pattern to create the complete pattern with distributed stitch lines in order to reduce or eliminate the stitching effect in laser ablation. The mask can also form a sparse and distributed pattern including apertures that individually form merging portions of the complete pattern and collectively form a distributed pattern.
41 Citations
22 Claims
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1. A distributed patterned mask for use in imaging a laser onto a substrate, comprising:
a mask having apertures for transmission of light and non-transmissive areas around the apertures, wherein the apertures collectively form a distributed portion of a complete pattern, and wherein when the apertures in the mask are repeatedly imaged onto the substrate, structures within the distributed portion merge within different areas of the imaged pattern to create the complete pattern on the substrate with distributed stitch lines. - View Dependent Claims (2, 3, 4, 5, 6, 7)
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8. A sparse and distributed patterned mask for use in imaging a laser onto a substrate, comprising:
a mask having apertures for transmission of light and non-transmissive areas around the apertures, wherein the apertures individually form portions of a complete pattern and collectively form a distributed portion of the complete pattern, wherein at least a portion of the non-transmissive areas exist on the mask in regions between the apertures that correspond to non-imaged regions on the substrate that are subsequently imaged by the apertures to create the complete pattern, and wherein when the apertures in the mask are repeatedly imaged onto the substrate, structures within the distributed portion merge within different areas of the imaged pattern to create the complete pattern on the substrate with distributed stitch lines. - View Dependent Claims (9, 10, 11, 12, 13, 14)
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15. A method for laser imaging a substrate using a distributed patterned mask, comprising:
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imaging the substrate through apertures for transmission of light, wherein non-transmissive areas surround the apertures and wherein the apertures in the mask collectively form a distributed portion of a complete pattern; moving the mask to a different position relative to the substrate; and repeating the imaging step, wherein when the apertures in the mask are repeatedly imaged onto the substrate, structures within the distributed portion merge within different areas of the imaged pattern to create the complete pattern on the substrate with distributed stitch lines. - View Dependent Claims (16, 17)
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18. A method for laser imaging a substrate using a sparse and distributed patterned mask, comprising:
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imaging the substrate through first apertures for transmission of light, wherein non-transmissive areas surround the first apertures and wherein the first apertures in the mask individually form first portions of a complete pattern; and imaging the substrate through one or more second apertures for transmission of light, wherein the non-transmissive areas surround the one or more second apertures and wherein the one or more second apertures in the mask individually form second portions of the complete pattern, wherein the first apertures and the one or more second apertures collectively form a distributed portion of the complete pattern, wherein the first apertures and the one or more second apertures together form the complete pattern when the first apertures and the one or more second apertures are individually imaged onto the substrate, and wherein when the first and the one or more second apertures in the mask are repeatedly imaged onto the substrate, structures within the first and second distributed portions merge within different areas of the imaged pattern to create the complete pattern on the substrate with distributed stitch lines. - View Dependent Claims (19, 20)
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21. A microreplicated article comprising:
an array of features, the array of features collectively forming a distributed portion of a complete pattern, that have structures repeatedly merging within different areas of the imaged pattern to create the complete pattern with distributed stitch lines.
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22. A microreplicated article comprising:
two or more repeating arrays of features, each of the arrays of features forming a constituent pattern as part of a complete pattern, that are interlaced to create the complete pattern, wherein the arrays of features collectively form a distributed portion of the complete pattern and have structures repeatedly merging within different areas of the imaged pattern to create the complete pattern with distributed stitch lines.
Specification