Interdigitated Back Contact Silicon Solar Cells With Separating Grooves

• US 20110070681A1
• Filed: 11/24/2010
• Published: 03/24/2011
• Est. Priority Date: 09/09/2008
• Status: Active Grant

• Current Assignee: Xerox Corporation (Xerox Holdings Corp.)
• Original Assignee: Palo Alto Research Center, Inc. (Xerox Holdings Corp.)
• Inventors: Nakayashiki, Kenta, Xu, Baomin
• Granted Patent: US 8,426,724 B2
• Time in Patent Office: Days
• US Class Current: 438/87
• CPC Class Codes: H01L 31/022425 for solar cells
• CPC Class Codes: H01L 31/022441 Electrode arrangements specially adapted for back-contact solar cells
• CPC Class Codes: H01L 31/0682 back-junction, i.e. rearside emitter, solar cells, e.g. interdigitated base-emitter regions back-junction cells
• CPC Class Codes: H01L 31/1804 comprising only elements of Group IV of the Periodic Table
• CPC Class Codes: Y02E 10/547 Monocrystalline silicon PV cells
• CPC Class Codes: Y02P 70/50 Manufacturing or production processes characterised by the final manufactured product

Abstract

Interdigitated back contact (IBC) solar cells are produced by depositing spaced-apart parallel pads of a first dopant bearing material (e.g., boron) on a substrate, heating the substrate to both diffuse the first dopant into corresponding first (e.g., p+) diffusion regions and to form diffusion barriers (e.g., borosilicate glass) over the first diffusion regions, and then disposing the substrate in an atmosphere containing a second dopant (e.g., phosphorus) such that the second dopant diffuses through exposed surface areas of the substrate to form second (e.g., n+) diffusion regions between the first (p+) diffusion regions (the diffusion barriers prevent the second dopant from diffusion into the first (p+) diffusion regions). The substrate material along each interface between adjacent first (p+) and second (n+) diffusion regions is then removed (e.g., using laser ablation) such that elongated grooves, which extend deeper into the substrate than the diffused dopant, are formed between adjacent diffusion regions.

Claims

1. A method of fabricating an IBC solar cell, the method comprising:

diffusing a first dopant into a rear surface of a semiconductor substrate such that first and second spaced-apart diffusion regions of the substrate have a first doping concentration and extends a first depth into the substrate from the rear surface, and are separated by a third diffusion region having a second doping concentration and extending a second depth into the substrate from the rear surface; and

forming a plurality of grooves in the rear surface of the semiconductor substrate such that the first diffusion region is separated from the third diffusion region by a first groove, and such that the second diffusion region is separated from the third diffusion region by a second groove.

2. The method according to claim 1, wherein diffusing the first dopant comprises:

depositing spaced-apart pads of said first dopant onto the rear surface of substrate over said first and second diffusion regions; and

heating the substrate such that a portion of the first dopant diffuses into said first and second diffusion regions through said rear surface, wherein the second doping concentration of the third diffusion region maintains said second doping concentration during said heating.

3. The method according to claim 2, wherein depositing the spaced-apart pads of said first dopant comprises one of extruding, screen printing, pad printing or jet printing said first dopant onto said rear surface.

4. The method according to claim 3,

wherein said first dopant comprises boron, and

wherein heating comprises heating a temperature such that borosilicate glass is formed on said rear surface over said first and second diffusion regions.

5. The method according to claim 4, further comprising, after forming said borosilicate glass, diffusing an n-type dopant into said third diffusion region such that said borosilicate glass prevents diffusion of said n-type dopant into said first and second diffusion regions.

6. The method according to claim 5, wherein diffusing the n-type dopant comprises disposing said substrate in a furnace containing POCl₃ at a temperature below 900°

C.

7. The method according to claim 2, further comprising, after said first dopant material is diffused into said first and second diffusion regions, diffusing a second dopant material into said third diffusion region such that said first dopant in said first and second diffusion regions serves as a diffusion barrier, whereby said third diffusion region acquires a third doping concentration determined by said second dopant material, and said first and second diffusion regions maintain said first doping concentration.

8. The method according to claim 2, wherein forming said plurality of grooves on the rear surface of the substrate comprises selectively laser ablating the rear surface of the substrate.

9. The method according to claim 2, wherein forming said plurality of grooves on the rear surface of the substrate comprises selectively chemical etching the rear surface of the substrate.

10. The method according to claim 2, wherein each of the first and second grooves has a third depth extending into substrate from rear surface that is greater than either of the first depth and the second depth.

11. A method of fabricating an IBC solar cell, the method comprising:

diffusing a first dopant into a rear surface of a semiconductor substrate such that first and second spaced-apart diffusion regions of the substrate have a first doping concentration and extends a first depth into the substrate from the rear surface, and are separated by a third diffusion region having a second doping concentration and extending a second depth into the substrate from the rear surface;

removing an elongated first portion of the semiconductor substrate that extends a third depth into the rear surface and is disposed between the first diffusion region and the third diffusion region such that the first diffusion region is entirely separated from the third diffusion region by a first groove; and

removing an elongated second portion of the semiconductor substrate that extends said third depth into the rear surface and is disposed between the second diffusion region and the third diffusion region such that the second diffusion region is entirely separated from the third diffusion region by a second groove,

wherein the third depth is greater than either of the first depth and the second depth.

12. The method according to claim 11, wherein removing said first portion and said second portion comprises chemical etching the rear surface of the substrate.

13. The method according to claim 11, wherein removing said first portion and said second portion comprises laser ablating the rear surface of the substrate.

14. A method of fabricating an IBC solar cell, the method comprising:

diffusing a first dopant into a rear surface of a semiconductor substrate such that first and second spaced-apart diffusion regions of the substrate have a first doping concentration and extends a first depth into the substrate from the rear surface,

diffusing a second dopant into the rear surface of the semiconductor substrate such that a third diffusion region of the substrate has a second doping concentration and extends a second depth into the substrate from the rear surface, the third diffusion region being disposed between the first and second diffusion regions; and

removing an elongated first portion of the semiconductor substrate that extends a third depth into the rear surface and is disposed between the first diffusion region and the third diffusion region and an elongated second portion of the semiconductor substrate that extends said third depth into the rear surface and is disposed between the second diffusion region and the third diffusion region, said elongated first and second portions being formed such that the first diffusion region is entirely separated from the third diffusion region by a first groove, and such that the second diffusion region is entirely separated from the third diffusion region by a second groove,

wherein the third depth is greater than either of the first depth and the second depth.

15. The method according to claim 14, wherein removing said first portion and said second portion comprises chemical etching the rear surface of the substrate.

16. The method according to claim 14, wherein removing said first portion and said second portion comprises laser ablating the rear surface of the substrate.