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Microneedle Structure And Production Method Therefor

  • US 20110073560A1
  • Filed: 12/02/2010
  • Published: 03/31/2011
  • Est. Priority Date: 08/28/2000
  • Status: Active Grant
First Claim
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1. A method for forming a microneedle structure from a wafer, the microneedle structure including a microneedle contiguous with, and projecting from, a substrate, the microneedle having a set of contiguous upright surfaces standing substantially perpendicular to the substrate, and an inclined surface inclined so as to intersect with the set of contiguous upright surfaces, the method comprising the steps of:

  • (a) processing the wafer by a first etching process to define the set of contiguous upright surfaces;

    (b) coating the upright surfaces with a protective coating; and

    (c) performing a wet etching process so as to form the inclined surface intersecting with the upright surfaces.

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