PLASMA GENERATING DEVICE AND METHOD

• US 20110079582A1
• Filed: 03/31/2009
• Published: 04/07/2011
• Est. Priority Date: 03/31/2008
• Status: Abandoned Application

• Current Assignee: Akira Yonesu, Nobuya Hayashi
• Original Assignee: Akira Yonesu, Nobuya Hayashi
• Inventors: Hayashi, Nobuya, Yonesu, Akira
• Application Number:
  US12/736,322
• Publication Number:
  US 20110079582A1
• Time in Patent Office: Days
• US Class Current: 216/70
• CPC Class Codes: A61L 2/14 Plasma, i.e. ionised gases
• CPC Class Codes: H05H 1/46 using applied electromagnetic fields, e.g. high frequency or microwave energy H05H1/26 takes precedence

Abstract

An object of the invention is to provide a plasma generating device and method for generating plasma through electrodeless discharge within a long tubule and carrying out a plasma process on the inside of the long tubule. The plasma generating device has a container 1 for containing a long tubule 9, the internal pressure of which can be adjusted, a magnetic field applying means 8 for applying a magnetic field in at least part of the long tubule, and a microwave supplying means 2 for emitting microwaves into the container, and is characterized in that plasma is generated within the long tubule by emitting microwaves into the container in such a state that a magnetic field is applied in at least part of the long tubule.

Claims

1. A plasma generating device, comprising:

a container for a long tubule that is open at both ends, wherein pressure inside of the long tubule is adjustable;

a magnetic field applying means for applying a magnetic field in at least part of the long tubule; and

a microwave supplying means for emitting microwaves into the container, wherein

microwaves are emitted into the container in such a state that at least one end of the long tubule is inside the container, the pressure inside the long tubule is adjusted to a predetermined pressure that is higher than a pressure within the container, and a magnetic field is applied in at least part of the long tubule so that plasma is generated within the long tubule.

2. The plasma generating device according to claim 1, wherein the magnetic field applying means is formed of at least a permanent magnet or an electromagnet.

3. The plasma generating device according to claim 2, wherein the magnetic field applying means is formed of a number of permanent magnets or electromagnets, and the magnets or electromagnets are arranged in such a manner that same magnetic poles face each other.

4. The plasma generating device according to claim 1, further comprising pressure adjusting means for adjusting the pressure inside the container, configured to reduce the pressure within the container to 1 Pa or less.

5. The plasma generating device according to claim 1, wherein the long tubule is an object to be sterilized using the plasma.

6. The plasma generating device according to claim 5, wherein a gas containing at least one of oxygen, argon and air is introduced into the container.

7. The plasma generating device according to claim 1, wherein the long tubule is an object to be coated with a film or etched on an inner wall of the long tubule using the plasma.

8. The plasma generating device according to claim 1, wherein a gas is introduced directly into the long tubule.

9. A plasma generating method, comprising:

putting a long tubule that is open at both ends in a container; and

emitting microwaves into the container in such a state that at least one end of the long tubule is inside the container, an inside of the long tubule is adjusted to a predetermined pressure that is higher than a pressure within the container, a magnetic field is applied in at least part of the long tubule, and plasma is generated inside the long tubule.

10. The plasma generating method according to claim 9, wherein the pressure inside or outside the long tubule is adjusted so that there is a predetermined difference in pressure between the inside of and an outside of the long tubule.

11. The plasma generating method according to claim 10, wherein making the predetermined difference in pressure comprises:

holding the long tubule in such a state that at least part of the long tubule is bent;

or making an opening at an end of the long tubule narrow.

12. The plasma generating method according to claim 9, wherein at least part of a magnetic field applying means for applying a magnetic field is provided inside the container and the long tubule is provided so as to be wound around part of the magnetic field applying means.

13. The plasma generating method according to claim 9, wherein the magnetic field is a solenoid field or a mirror field, and the long tubule is placed in a vicinity of a center of the magnetic field.

14. The plasma generating method according to claim 9, wherein the pressure within the long tubule is 0.01 Pa to 1 Pa when plasma is generated.

15. The plasma generating method according to claim 9, wherein the long tubule is an object to be sterilized.

16. The plasma generating method according to claim 15, wherein a gas containing at least one of oxygen, argon and air is introduced into the container.

17. The plasma generating method according to claim 15 wherein input power for the microwaves is adjusted so that a temperature inside the long tubule remains at 60°

C. or lower.

18. The plasma generating method according to claim 15, wherein the long tubule is contained in a resin bag for preventing bacteria and viruses from entering.

19. The plasma generating method according to claim 9, wherein the long tubule is an object to be coated with a film or etched using plasma, on an inner wall surface of the long tubule.

20. The plasma generating method according to claim 9, wherein a gas is introduced directly into the long tubule.