NANO WIRE BASED PASSIVE PIXEL IMAGE SENSOR
First Claim
1. A device comprising:
- an array of pixels, the pixels comprising a nanowire photodiode comprising a nanowire and a substrate, wherein the pixels are passive pixels.
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Abstract
An imaging device including a plurality of photo-sensitive elements suitable for imaging small objects less than 500 nm in size. Each of the photo-sentive elements forms a passive pixel which comprises at least one nanowire structured photodetector and a switch transistor. The nanowire structured photodetector is configured to receive the photons and store the photo generated charges and behave as a waveguide. The switch transistor is formed either in the substrate or at the same body of the nanowire and is configured to allow photo-genereated charges in the nanowire to accumulate when off and to drain from the nanowire when on. The pixel array is configured to allow high resolution imaging by arranging in a penny round pattern.
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Citations
67 Claims
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1. A device comprising:
an array of pixels, the pixels comprising a nanowire photodiode comprising a nanowire and a substrate, wherein the pixels are passive pixels. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 30, 34, 35, 36, 37)
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16. A device comprising a passive pixel sensor comprising:
an array of pixels, the pixels comprising a nanowire photodiode comprising a nanowire and a substrate, wherein the pixels are passive pixels. - View Dependent Claims (17, 18, 19, 20, 21, 22, 23, 24, 25, 26, 27, 28, 29, 31, 32, 33, 38, 39, 40, 41, 42, 43, 44, 45, 46, 47, 48, 50, 51, 52, 53, 54, 55)
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49. (canceled)
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56. A method of imaging comprising:
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obtaining a nanowire sensor array comprising an array of pixels, the pixels comprising a nanowire photodiode and a substrate; placing an object in contact with the nanowire sensor array; exposing the object and sensor to electromagnetic radiation; and detecting an image of the object, wherein the pixels are passive pixels. - View Dependent Claims (57, 58, 59, 60, 61, 62)
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63. A device comprising:
an array of pixels, the pixels comprising a nanowire photodiode comprising a nanowire and a substrate, wherein the nanowire is surrounded by two or more concentric dielectric layers, wherein the pixels are passive pixels. - View Dependent Claims (64, 65, 66, 67)
Specification