NANO WIRE BASED PASSIVE PIXEL IMAGE SENSOR

• US 20110079704A1
• Filed: 10/07/2009
• Published: 04/07/2011
• Est. Priority Date: 10/07/2009
• Status: Active Grant

• Current Assignee: Zena Technologies, Inc.
• Original Assignee: Zena Technologies, Inc.
• Inventors: Wober, Munib, YU, Young-June
• Granted Patent: US 8,384,007 B2
• Time in Patent Office: Days
• US Class Current: 250/208.1
• CPC Class Codes: H01L 27/14607 Geometry of the photosensitive area
• CPC Class Codes: H01L 27/1461 characterised by the photosensitive area
• CPC Class Codes: H01L 27/14612 involving a transistor
• CPC Class Codes: H01L 27/14643 Photodiode arrays; MOS imagers

Abstract

An imaging device including a plurality of photo-sensitive elements suitable for imaging small objects less than 500 nm in size. Each of the photo-sentive elements forms a passive pixel which comprises at least one nanowire structured photodetector and a switch transistor. The nanowire structured photodetector is configured to receive the photons and store the photo generated charges and behave as a waveguide. The switch transistor is formed either in the substrate or at the same body of the nanowire and is configured to allow photo-genereated charges in the nanowire to accumulate when off and to drain from the nanowire when on. The pixel array is configured to allow high resolution imaging by arranging in a penny round pattern.

Claims

1. A device comprising:

an array of pixels, the pixels comprising a nanowire photodiode comprising a nanowire and a substrate, wherein the pixels are passive pixels.

2. The device of claim 1, wherein the substrate does not comprise a photodiode.

3. The device of claim 1, wherein the nanowire is configured to separate wavelengths of an electromagnetic radiation beam incident on the pixel at a selective wavelength through the nanowire, wherein the nanowire is configured to be both a channel to transmit the wavelengths up to the selective wavelength and an active element to detect the wavelengths up to the selective wavelength transmitted through the nanowire.

4. The device of claim 3, wherein the selective wavelength comprises ultraviolet light and smaller wavelength light.

5. The device of claim 1, wherein the device is configured to detect objects of approximately 500 nm or less in size.

6. The device of claim 5, wherein the device is configured to detect objects of approximately 100 nm or less in size.

7. The device of claim 1, wherein the nanowire comprises silicon.

8. The device of claim 1, wherein spacing between nanowires is filled with SiO₂.

9. The device of claim 1, wherein spacing between nanowires is filled with air.

10. The device of claim 1, wherein the array of pixels are arranged in a penny round pattern.

11. The device of claim 9, wherein the pixel array pattern comprises a Bayer pattern.

12. The device of claim 1, wherein the nanowire photodiode comprises a axial p-i-n junction.

13. The device of claim 1, wherein the nanowire photodiode comprises a coaxial p-i-n junction.

14. The device of claim 1, wherein the nanowire photodiode comprises a peripheral circuit element.

15. The device of claim 1, further comprising an optical imaging system.

30. The device claim 14, wherein the pixels comprise a vertical p-i-n nanowire structure and a photodiode in the substrate.

34. The device of claim 30, wherein the vertical p-i-n nanowire structure comprises an n−

core surrounded with an intrinsic layer, the intrinsic layer surrounded by an p+ layer.

35. The device of claim 34, wherein the pixels are configured so that the substrate is at electrical ground and a negative bias applied to the pixels allows the nanowire and the substrate to be depleted of mobile charges.

36. The device of claim 35, wherein the nanowire is configured with two electric filed components, one electric field component directed toward a center of the nanowire and the other directed toward the substrate.

37. The device of claim 36, wherein charges in the nanowire move toward the center of the nanowire and then toward the substrate.

16. A device comprising a passive pixel sensor comprising:

an array of pixels, the pixels comprising a nanowire photodiode comprising a nanowire and a substrate, wherein the pixels are passive pixels.

17. The device of claim 16, further comprising a switch, the switch configured to allow photo-generated charges in the nanowire to accumulate when off and to drain from the nanowire when on.

18. The device of claim 16, further comprising at least one light source.

19. The device of claim 16, wherein the array of pixels comprises rows and columns and each pixel has an output connected to a column signal bus.

20. The device of claim 19, wherein the signal bus is connect to an input of an amplifier.

21. The device of claim 16, wherein the switch comprises a transfer gate, the array of pixels comprises rows and columns, and each transfer gate in a row is connected to a single bus line driven by a vertical driver.

22. The device of claim 20, wherein the array of pixels is configured to read out row by row.

23. The device of claim 16, wherein the nanowire is configured to separate wavelengths of an electromagnetic radiation beam incident on the pixel at a selective wavelength through the nanowire, wherein the nanowire is configured to be both a channel to transmit the wavelengths up to the selective wavelength and a photosensitive element to detect the wavelengths up to the selective wavelength transmitted through the nanowire.

24. The device of claim 23, wherein the pixels further comprise a photodiode in the substrate.

25. The device of claim 24, wherein the photodiode in the substrate is configured to absorb photons at wavelengths longer than the selective wavelength.

26. The device of claim 25, further comprising a vertical photogate and dielectric material having a refractive index lower than a refractive index of the nanowire deposited around the nanowire to form a capacitor between the vertical photogate and the nanowire.

27. The device of claim 26, wherein the vertical photogate is configured to control the potential in the nanowire, forming a potential gradient in the vertical and horizontal directions.

28. The device of claim 16, wherein each pixel comprises a shallow trench isolation region configured to electrically isolate the pixels from each other.

29. The device of claim 16, wherein each pixel further comprises an indium tin oxide (ITO) layer and wherein a bias voltage is applied to the pixels through the ITO layer.

31. The device of claim 19, wherein the vertical p-i-n nanowire structure comprises an intrinsic nanowire core, a p+ layer at the top of the intrinsic nanowire core and an n−

region in the substrate below the intrinsic nanowire core.

32. The device of claim 31, wherein the pixels are configured so that a negative bias applied to the pixel depletes the nanowire of charges and generates a potential gradient in the nanowire that sweeps the charges to the substrate.

33. The device of claim 31, wherein the nanowire is further coated with a material configured to guide light down the nanowire and reduce optical crosstalk between pixels.

38. The device of claim 16, wherein each pixel comprises a vertical photogate and a switch placed on the nanowire photodiode.

39. The device of claim 38, wherein the array of pixels is configured in rows and columns and the substrate is comprises an n+ layer configured to connect nanowires in a column.

40. The device of claim 39, wherein the n+ layer in the substrate is configured as a signal bus line.

41. The device of claim 38, wherein the pixels are configured such that when the switch is off, a potential barrier is formed underneath the switch, allowing photo-generated charges in the nanowire to accumulate.

42. The device of claim 41, wherein the nanowire is electrically isolated from the substrate but not optically isolated from the substrate.

43. The device of claim 38, wherein when the switch is turned on, charges in the nanowire flow into the substrate.

44. The device of claim 16, wherein the pixels comprise a vertical p-i-n nanowire structure and a nanowire switch.

45. The device of claim 44, wherein the vertical p-i-n nanowire structure comprises an intrinsic nanowire core, a p+ layer at the top of the intrinsic nanowire core and an n+ region in the substrate below the nanowire, the substrate having p−

doping.

46. The device of claim 45, wherein the nanowire comprises an n−

layer between the switch and the intrinsic nanowire core.

47. The device of claim 45, wherein the n+ region has a substantially annular shape with a hole, the hole configured to provide an electrical path from the intrinsic nanowire to the p−

doped substrate.

48. The device of claim 44, wherein the vertical p-i-n nanowire structure comprises an n−

core surrounded with an intrinsic layer, the intrinsic layer surrounded by an p+ layer.

50. The device of claim 44, wherein the vertical p-i-n nanowire structure comprises an intrinsic nanowire core, a p+ layer at the top of the intrinsic nanowire core and an n+ region in below the nanowire, wherein the n+ region is on a metal strip on an insulating layer on the substrate.

51. The device of claim 50, wherein the n+ region has an ohmic contact with the metal strip.

52. The device of claim 50, wherein the substrate comprises silicon, a III-V semiconductor, and II-VI semiconductor, or plastic.

53. The device of claim 50, wherein the pixels do not comprise a photodiode in the substrate.

54. The device of claim 44, wherein the vertical p-i-n nanowire structure comprises an n−

core surrounded with an intrinsic layer, the intrinsic layer surrounded by an p+ layer, the vertical p-i-n structure further comprising an n+ region in below the nanowire, wherein the n+ region is on a metal strip on an insulating layer on the substrate.

55. The device of claim 54, wherein the substrate comprises silicon, a III-V semiconductor, and II-VI semiconductor, or plastic.

49. (canceled)

56. A method of imaging comprising:

obtaining a nanowire sensor array comprising an array of pixels, the pixels comprising a nanowire photodiode and a substrate;

placing an object in contact with the nanowire sensor array;

exposing the object and sensor to electromagnetic radiation; and

detecting an image of the object,

wherein the pixels are passive pixels.

57. The method of claim 56, wherein the nanowire sensor comprises at least one light source.

58. The device of claim 56, wherein the nanowire sensor is configured to detect objects of approximately 500 nm or less in size.

59. The method of claim 56, wherein the light is collimated.

60. The method of claim 56, wherein the pixels are arranged in a penny round pattern.

61. The method of claim 56, wherein the array is of pixels comprises rows and columns and the array is read row by row.

62. The method of claim 56, wherein charges generated in the pixels are amplified outside of the pixel array.

63. A device comprising:

an array of pixels, the pixels comprising a nanowire photodiode comprising a nanowire and a substrate, wherein the nanowire is surrounded by two or more concentric dielectric layers, wherein the pixels are passive pixels.

64. The device of claim 63, wherein the nanowire lacks a concentric metal layer.

65. The device of claim 63, wherein successive concentric dielectric layers of the two or more concentric dielectric layers have a lower index of refraction with increasing radius.

66. The device of claim 63, wherein concentric dielectric layers having a larger radius have a lower index of refraction than concentric dielectric layers having a smaller radius.

67. The device of claim 63, wherein adjacent concentric dielectric layers have alternating higher and lower index of refraction.