CALIBRATION METHOD FOR INERTIAL DRIVE ACTUATOR, AND INERTIAL DRIVE ACTUATOR DEVICE
First Claim
1. A calibration method for an inertial drive actuator of detecting a position of a moving body based on an electrostatic capacitance, the calibration method comprising:
- driving the moving body;
outputting a first signal for detecting the electrostatic capacitance of opposing parts of a moving body side electrode provided on the moving body and a detecting electrode provided opposing the moving body side electrode;
receiving a second signal obtained after the first signal output at the outputting has passed through the moving body side electrode and the detecting electrode; and
calculating an optimum first signal based on the second signal received at the receiving.
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Abstract
A calibration method for an inertial drive actuator of detecting a position of a moving body based on an electrostatic capacitance is proposed. The calibration method includes driving the moving body; outputting a first signal for detecting the electrostatic capacitance of opposing parts of a moving body side electrode provided on the moving body and a detecting electrode provided opposing the moving body side electrode; receiving a second signal obtained after the first signal output at the outputting has passed through the moving body side electrode and the detecting electrode; and calculating an optimum first signal based on the second signal received at the receiving.
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Citations
18 Claims
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1. A calibration method for an inertial drive actuator of detecting a position of a moving body based on an electrostatic capacitance, the calibration method comprising:
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driving the moving body; outputting a first signal for detecting the electrostatic capacitance of opposing parts of a moving body side electrode provided on the moving body and a detecting electrode provided opposing the moving body side electrode; receiving a second signal obtained after the first signal output at the outputting has passed through the moving body side electrode and the detecting electrode; and calculating an optimum first signal based on the second signal received at the receiving. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11)
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12. An inertial drive actuator device comprising:
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a driving unit that drives a moving body; an output unit that outputs a first signal for detecting an electrostatic capacitance of opposing parts of a moving body side electrode provided on the moving body and a detecting electrode provided opposing the moving body side electrode; a receiving unit that receives a second signal obtained after the first signal output by the output unit has passed through the moving body side electrode and the detecting electrode; and a calculating unit that calculates an optimum first signal based on the second signal received by the receiving unit. - View Dependent Claims (13, 14, 15, 16, 17, 18)
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Specification