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CALIBRATION METHOD FOR INERTIAL DRIVE ACTUATOR, AND INERTIAL DRIVE ACTUATOR DEVICE

  • US 20110080178A1
  • Filed: 09/28/2010
  • Published: 04/07/2011
  • Est. Priority Date: 10/05/2009
  • Status: Active Grant
First Claim
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1. A calibration method for an inertial drive actuator of detecting a position of a moving body based on an electrostatic capacitance, the calibration method comprising:

  • driving the moving body;

    outputting a first signal for detecting the electrostatic capacitance of opposing parts of a moving body side electrode provided on the moving body and a detecting electrode provided opposing the moving body side electrode;

    receiving a second signal obtained after the first signal output at the outputting has passed through the moving body side electrode and the detecting electrode; and

    calculating an optimum first signal based on the second signal received at the receiving.

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