CALIBRATION METHOD FOR INERTIAL DRIVE ACTUATOR, AND INERTIAL DRIVE ACTUATOR DEVICE

• US 20110080178A1
• Filed: 09/28/2010
• Published: 04/07/2011
• Est. Priority Date: 10/05/2009
• Status: Active Grant

• Current Assignee: Olympus Corporation
• Original Assignee: Olympus Corporation
• Inventors: MORISHIMA, Tetsuya
• Granted Patent: US 8,686,740 B2
• Time in Patent Office: Days
• US Class Current: 324/601
• CPC Class Codes: H02N 2/025 Inertial sliding motors
• CPC Class Codes: H02N 2/062 Small signal circuits; Means for controlling position or derived quantities, e.g. for removing hysteresis

Abstract

A calibration method for an inertial drive actuator of detecting a position of a moving body based on an electrostatic capacitance is proposed. The calibration method includes driving the moving body; outputting a first signal for detecting the electrostatic capacitance of opposing parts of a moving body side electrode provided on the moving body and a detecting electrode provided opposing the moving body side electrode; receiving a second signal obtained after the first signal output at the outputting has passed through the moving body side electrode and the detecting electrode; and calculating an optimum first signal based on the second signal received at the receiving.

Claims

1. A calibration method for an inertial drive actuator of detecting a position of a moving body based on an electrostatic capacitance, the calibration method comprising:

driving the moving body;

outputting a first signal for detecting the electrostatic capacitance of opposing parts of a moving body side electrode provided on the moving body and a detecting electrode provided opposing the moving body side electrode;

receiving a second signal obtained after the first signal output at the outputting has passed through the moving body side electrode and the detecting electrode; and

calculating an optimum first signal based on the second signal received at the receiving.

2. The calibration method for the inertial drive actuator according to claim 1, further comprising confirming, after the optimum first signal is calculated at the calculating, whether the optimum first signal is optimal.

3. The calibration method for the inertial drive actuator according to claim 2, wherein the confirming includes determining whether the second signal is equal to an optimum second signal corresponding to the optimum first signal.

4. The calibration method for the inertial drive actuator according to claim 3, further comprising subjecting the optimum first signal calculated at the calculating to a correction calculation if it is determined at the determining that the second signal is not equal to the optimum second signal.

5. The calibration method for the inertial drive actuator according to claim 1, wherein the outputting includes outputting different signals when outputting the first signal to the moving body twice or more at one position.

6. The calibration method for the inertial drive actuator according to claim 1, wherein the moving body is movable between a one movement limit position and an other movement limit position, and

the calculating includes calculating the optimum first signal at each of the one movement limit position and the other movement limit position.

7. The calibration method for the inertial drive actuator according to claim 1, wherein the outputting includes staring output of the first signal with a signal that is within an allowable range for A/D conversion.

8. The calibration method for the inertial drive actuator according to claim 6, wherein the electrostatic capacitance is proportionally related to a distance from the one movement limit position to the other movement limit position.

9. The calibration method for the inertial drive actuator according to claim 1, wherein when there is a plurality of the moving bodies, there is a separate optimum first signal for each moving body.

10. The calibration method for the inertial drive actuator according to claim 1, wherein when there is a plurality of the moving bodies, the optimum first signals of the moving bodies are unified.

11. The calibration method for the inertial drive actuator according to claim 6, further comprising comparing the optimum first signals to determine which one is optimal when the optimum first signals at the one movement limit position and the other movement limit position differ from each other.

12. An inertial drive actuator device comprising:

a driving unit that drives a moving body;

an output unit that outputs a first signal for detecting an electrostatic capacitance of opposing parts of a moving body side electrode provided on the moving body and a detecting electrode provided opposing the moving body side electrode;

a receiving unit that receives a second signal obtained after the first signal output by the output unit has passed through the moving body side electrode and the detecting electrode; and

a calculating unit that calculates an optimum first signal based on the second signal received by the receiving unit.

13. The inertial drive actuator device according to claim 12, wherein

the moving body moves by inertia in relation to an oscillating plate that is moved to reciprocate, and

the detecting electrode is disposed between the moving body and the oscillating plate.

14. The inertial drive actuator device according to claim 13, wherein the detecting electrode also functions as a driving electrode that produces electrostatic attraction between itself and the moving body side electrode and controls frictional forces between the oscillating plate and the moving body.

15. The inertial drive actuator device according to claim 12, wherein a plurality of the detecting electrodes is provided.

16. The inertial drive actuator device according to claim 12, wherein a plurality of the moving bodies is provided.

17. The inertial drive actuator device according to claim 12, wherein the moving body is made of a conductive material.

18. The inertial drive actuator device according to claim 13, further comprising a permanent magnet disposed on a side of the oscillating plate opposite to the moving body,

wherein the moving body includes a magnetic material.