METHOD OF MAKING A LIGHT MODULATING DISPLAY DEVICE AND ASSOCIATED TRANSISTOR CIRCUITRY AND STRUCTURES THEREOF
First Claim
1. A method of manufacturing a device, comprising:
- forming at least one electromechanical device on a substrate, each electromechanical device comprising a movable first electrode layer formed over the substrate and a second electrode separated by a spacing from the movable first electrode layer; and
forming at least one transistor circuit on the substrate,wherein forming the at least one electromechanical device and the at least one transistor circuit comprises depositing at least one layer of material to form a portion of the at least one electromechanical device and a portion of the at least one transistor circuit.
4 Assignments
0 Petitions
Accused Products
Abstract
An Interferometric Modulator (IMod) is a microelectromechanical device for modulating light using interference. The colors of these devices may be determined in a spatial fashion, and their inherent color shift may be compensated for using several optical compensation mechanisms. Brightness, addressing, and driving of IMods may be accomplished in a variety of ways with appropriate packaging, and peripheral electronics which can be attached and/or fabricated using one of many techniques. The devices may be used in both embedded and directly perceived applications, the latter providing multiple viewing modes as well as a multitude of product concepts ranging in size from microscopic to architectural in scope.
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Citations
24 Claims
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1. A method of manufacturing a device, comprising:
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forming at least one electromechanical device on a substrate, each electromechanical device comprising a movable first electrode layer formed over the substrate and a second electrode separated by a spacing from the movable first electrode layer; and forming at least one transistor circuit on the substrate, wherein forming the at least one electromechanical device and the at least one transistor circuit comprises depositing at least one layer of material to form a portion of the at least one electromechanical device and a portion of the at least one transistor circuit. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9)
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10. A device comprising:
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means for modulating light formed over a substrate, the light modulating means comprising a first mirror formed over the substrate and a second mirror separated by a spacing from the first mirror; and means for driving formed on the substrate, wherein a layer of the light modulating means and a layer of the driving means each comprise a portion of the same deposited layer of material. - View Dependent Claims (11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21, 22, 23, 24)
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Specification