×

METHOD FOR REMOVING ELECTRICITY AND METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE

  • US 20110081747A1
  • Filed: 09/29/2010
  • Published: 04/07/2011
  • Est. Priority Date: 10/05/2009
  • Status: Active Grant
First Claim
Patent Images

1. A method for removing electricity, comprising the steps of:

  • suppressing generation of a static charge which is caused by wind at a surface of a substrate provided with a thin film transistor by blocking wind; and

    heating the substrate to transfer internal charges to an atmosphere over the substrate and holding the atmosphere.

View all claims
  • 1 Assignment
Timeline View
Assignment View
    ×
    ×