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SEMICONDUCTOR PROCESSING APPARATUS WITH SIMULTANEOUSLY MOVABLE STAGES

  • US 20110083496A1
  • Filed: 10/09/2009
  • Published: 04/14/2011
  • Est. Priority Date: 10/09/2009
  • Status: Active Grant
First Claim
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1. An apparatus for processing semiconductor wafers, said apparatus comprising:

  • a duality of stages, each said stage adapted for retaining a corresponding semiconductor wafer thereon,said duality of stages movable simultaneously in opposite directions while a processing operation is being carried out upon said semiconductor wafers.

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