PROCESS FOR PRODUCING CAPACITIVE ELECTROMECHANICAL CONVERSION DEVICE, AND CAPACITIVE ELECTROMECHANICAL CONVERSION DEVICE
First Claim
1. A process for producing a capacitive electromechanical conversion device by bonding together a substrate and a membrane member to form a cavity sealed between the substrate and the membrane member, the process for producing a capacitive electromechanical conversion device comprising the steps of:
- providing a gas release path penetrating from a bonded interface between the substrate and the membrane member to the outside, andforming the cavity by bonding the membrane member with the substrate with the gas release path provided;
the gas release path being provided at a location where the path does not communicate with the cavity.
1 Assignment
0 Petitions
Accused Products
Abstract
A process for producing a capacitive electromechanical conversion device by bonding together a substrate and a membrane member to form a cavity sealed between the substrate and the membrane member, the process for producing a capacitive electromechanical conversion device comprises the steps of: providing a gas release path penetrating from a bonded interface between the substrate and the membrane member to the outside, and forming the cavity by bonding the membrane member with the substrate with the gas release path provided; the gas release path being provided at a location where the path does not communicate with the cavity.
-
Citations
10 Claims
-
1. A process for producing a capacitive electromechanical conversion device by bonding together a substrate and a membrane member to form a cavity sealed between the substrate and the membrane member, the process for producing a capacitive electromechanical conversion device comprising the steps of:
-
providing a gas release path penetrating from a bonded interface between the substrate and the membrane member to the outside, and forming the cavity by bonding the membrane member with the substrate with the gas release path provided; the gas release path being provided at a location where the path does not communicate with the cavity. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8)
-
-
9. A capacitive electromechanical conversion device obtained by bonding together a substrate and a membrane member to form a cavity sealed between the substrate and the membrane member,
characterized in that a gas release path penetrating from a bonded interface between the substrate and the membrane member to the outside and not communicating with the cavity is provided in at least one of the substrate and the membrane member.
Specification