METHOD FOR MAKING AN OPTICAL DEVICE WITH INTEGRATED OPTOELECTRONIC COMPONENTS
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Abstract
A method for making an optical device with integrated optoelectronic components, including a) making a protective structure including a support in which at least one blind hole is made, an optical element being positioned in the blind hole, b) attaching the support to a substrate including the integrated optoelectronic components, the blind hole forming a cavity in which the optical element faces one of the optoelectronic components, c) achieving thinning of the substrate and making electric connections through the substrate, and d) making an aperture through the bottom wall of the blind hole, uncovering at least one portion of the optical field of the optical element.
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Citations
32 Claims
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1-21. -21. (canceled)
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22. A method for making an optical device with integrated optoelectronic components, comprising:
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a) making a protective structure comprising at least one support in which at least one blind hole is made, at least one optical element being positioned in the blind hole and attached to at least one wall of the blind hole; b) attaching the support to a substrate comprising the integrated optoelectronic components, the blind hole forming a cavity in which the optical element faces one of the optoelectronic components; c) performing thinning of the substrate and making electric connections through the substrate; and d) making at least one aperture through the bottom wall of the blind hole, uncovering at least one portion of the optical field of the optical element. - View Dependent Claims (23, 24, 25, 26, 27, 28, 29, 30, 31, 32)
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Specification