APPARATUS AND SYSTEMS FOR PROCESSING SIGNALS BETWEEN A TESTER AND A PLURALITY OF DEVICES UNDER TEST
First Claim
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1. Apparatus for processing signals between a tester and a plurality of devices under test, the apparatus comprising:
- at least one multichip module, each of the at least one multichip module comprising;
a plurality of micro-electromechanical switches between a first set of connectors to the tester and a second set of connectors to the plurality of devices under test; and
at least one driver to selectively operate each of the plurality of micro-electromechanical switches.
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Abstract
Apparatus is for processing signals between a tester and devices under test. In one embodiment, the apparatus includes at least one multichip module. Each multichip module has a plurality of micro-electromechanical switches between a set of connectors to the tester and a set of connectors to devices under test. At least one driver is provided to operate each of the micro-electromechanical switches. Other embodiments are also disclosed.
29 Citations
18 Claims
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1. Apparatus for processing signals between a tester and a plurality of devices under test, the apparatus comprising:
at least one multichip module, each of the at least one multichip module comprising; a plurality of micro-electromechanical switches between a first set of connectors to the tester and a second set of connectors to the plurality of devices under test; and at least one driver to selectively operate each of the plurality of micro-electromechanical switches. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8)
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9. A system for processing signals between a tester and a plurality of devices under test, the system comprising:
at least one multichip module mounted directly on a probe card and operable at a temperature of at least 125°
C., and each of the at least one multichip module having a plurality of micro-electromechanical switches between a first set of connectors to the tester and a second set of connectors to the plurality of devices under test.- View Dependent Claims (10)
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11. A system for testing a plurality of devices under test, the system comprising:
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a set of tester electronics to generate signals for application to the plurality of devices under test, and to receive signals generated by the plurality of devices under test; a probe card with at least one multichip module mounted thereon, each of the at least one multichip module comprising a plurality of micro-electromechanical switches between a first set of connectors to the set of tester electronics and a second set of connectors to the plurality of devices under test, and a driver to selectively operate each of the plurality of micro-electromechanical switches; and a probe array to transmit signals between the at least one multichip module of the probe card and the plurality of devices under test. - View Dependent Claims (12, 13, 14, 15, 16, 17, 18)
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Specification