HIGH SPEED OPTICAL INSPECTION SYSTEM WITH ADAPTIVE FOCUSING
First Claim
1. An optical inspection system for inspecting a substrate, the system comprising:
- an array of cameras configured to acquire a plurality of sets of images as the substrate and the array undergo relative motion with respect to each other;
at least one focus actuator operably coupled to each camera of the array of cameras to cause displacement of at least a portion of each camera that affects focus;
a substrate range calculator configured to receive at least portions of images from the array and calculate range between the array of cameras and the substrate; and
a controller coupled to the array of cameras and to the range calculator, the controller being configured to provide a control signal to each of the at least one focus actuator to adaptively focus each camera of the array during the relative motion.
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Accused Products
Abstract
An optical inspection system for inspecting a substrate is provided. The system includes an array of cameras configured to acquire a plurality of sets of images as the substrate and the array undergo relative motion with respect to each other. At least one focus actuator is operably coupled to each camera of the array of cameras to cause displacement of at least a portion of each camera that affects focus. A substrate range calculator is configured to receive at least portions of images from the array and to calculate range between the array of cameras and the substrate. A controller is coupled to the array of cameras and to the range calculator. The controller is configured to provide a control signal to each of the at least one focus actuator to adaptively focus each camera of the array during the relative motion.
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Citations
28 Claims
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1. An optical inspection system for inspecting a substrate, the system comprising:
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an array of cameras configured to acquire a plurality of sets of images as the substrate and the array undergo relative motion with respect to each other; at least one focus actuator operably coupled to each camera of the array of cameras to cause displacement of at least a portion of each camera that affects focus; a substrate range calculator configured to receive at least portions of images from the array and calculate range between the array of cameras and the substrate; and a controller coupled to the array of cameras and to the range calculator, the controller being configured to provide a control signal to each of the at least one focus actuator to adaptively focus each camera of the array during the relative motion. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13)
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14. A method for inspecting a substrate, the method comprising:
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providing an array of cameras configured to acquire images of the substrate while the substrate and the array of cameras undergo relative motion with respect to each other; computing range between the array of cameras and the substrate; adjusting focus of at least one camera of the array of cameras and acquiring a set of images with the array of cameras after adjusting focus; and processing the set of images to determine an inspection result relative to the substrate. - View Dependent Claims (15, 16, 17, 18, 19, 20, 21, 22, 23, 24, 25, 26, 27, 28)
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Specification