APPARATUS FOR DETECTING ARCS

• US 20110090503A1
• Filed: 05/03/2010
• Published: 04/21/2011
• Est. Priority Date: 10/15/2009
• Status: Abandoned Application

• Current Assignee: Hwaback Engineering Co., Ltd.
• Original Assignee: Hwaback Engineering Co., Ltd.
• Inventors: Ahn, Jong Hwan, LEE, Kang, LEE, Sang Youl, HONG, Sang Jeen
• Application Number:
  US12/772,598
• Publication Number:
  US 20110090503A1
• Time in Patent Office: Days
• US Class Current: 356/406
• CPC Class Codes: G01J 3/02 Details
• CPC Class Codes: G01J 3/0202 Mechanical elements; Supports for optical elements
• CPC Class Codes: G01J 3/0264 Electrical interface; User interface
• CPC Class Codes: G01J 3/443 Emission spectrometry
• CPC Class Codes: G01N 21/25 Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
• CPC Class Codes: G01N 21/68 using high frequency electric fields

Abstract

An apparatus for detecting arc that can monitor inside of process chamber sensitively and promptly can be provided, and abnormal condition of plasma in process chamber can be detected. And, by installing RGB sensor portion independently or installing the RGB sensor portion in master board, flexibility in configuration can be provided.

Claims

1. An apparatus for detecting arc comprising:

a RGB sensor portion including RGB module sensing respective red, green, and blue color of light emitted from plasma in plasma process chamber;

a master board processing signals from the RGB sensor portion and controlling the process chamber or displaying process condition of the chamber;

a analogue digital converter for converting RGB signal sensed by the RGB sensor portion to digital signal;

a color analysis portion converting digital RGB signal to numerically quantitative RGB light data of plasma by analysis for respective RGB signal;

a comparison portion comparing the RGB light data transmitted from the color analysis portion and RGB light data obtained from plasma in normal condition; and

the RGB module includes,

a RGB color sensor receiving light of red, green, and blue from plasma gas in process chamber through R channel sensor, G channel sensor, and B channel sensor;

a amplifier amplifying signal sensed by the RGB color sensor; and

the master board includes, a main processor outputting control signal for controlling operation of process chamber or display signal for displaying condition of process chamber by gathering the RGB light data transmitted from the color analysis portion and signal transmitted from the comparison portion;

an alarm portion outputting alarm melody or alarm light according to signal transmitted from the main processor;

a real time display portion for displaying data related with process parameter in the process chamber according to the signal transmitted from the main processor such that operator may confirm condition of the process chamber.

2. The apparatus for detecting arc according to claim 1, wherein the RGB module includes, the analogue digital converter;

and

a signal processing portion having the color analysis portion, the comparison portion, and communication port portion communicating with the master board, and the RGB sensor portion including the RGB module is installed oppositely to view port of process chamber.

3. The apparatus for detecting arc according to claim 2, wherein the RGB sensor portion and the master board are connected with each other by communication line, so the RGB sensor portion and the master board are installed independently of each other.

4. The apparatus for detecting arc according to claim 1, wherein the RGB sensor portion is provided in the master board integrally, and the master board includes the analogue digital converter, the color analysis portion, and the comparison portion.

5. The apparatus for detecting arc according to claim 4, wherein the master board including the RGB sensor portion is installed oppositely to view port of process chamber

6. The apparatus for detecting arc according to claim 1, wherein the RGB module includes, a analogue digital converter;

a signal processing portion having the color analysis portion, the comparison portion, and communication port portion communicating with the master board, and

the RGB sensor portion including the RGB module is connected with view port of process chamber through optical cable.

7. The apparatus for detecting arc according to claim 6, wherein the RGB sensor portion is connected with the master board through communication line, and the RGB sensor portion and the master board are installed independently of each other.

8. The apparatus for detecting arc according to claim 1, wherein the RGB sensor portion is provided in the master board integrally, and the master board includes the analogue digital converter, the color analysis portion, and the comparison portion, the RGB sensor portion included in the master board is connected with view port of process chamber through optical cable.

9. The apparatus for detecting arc according to claim 1, wherein RGB signal sensed by the RGB sensor portion is converted to numerical value of respective R channel data, G channel data, and B channel data in the color analysis portion, and R, G, B channel data transmitted from the color analysis portion are compared respectively with R, G, B channel data of process permission range in the comparison portion, and when at least one data of the respective channel data is out of the process permission range, plasma in the process chamber is determined to be in abnormal condition.

10. The apparatus for detecting arc according to claim 1, wherein RGB signal sensed by the RGB sensor portion is converted to numerical value of respective R channel data, G channel data, and B channel data in the color analysis portion, and the RGB channel data is converted to hue data, saturation data, and brightness data by combination, and the hue data, saturation data, and brightness data transmitted from the color analysis portion are compared respectively with hue data, saturation data, and brightness data of process permission range in the comparison portion, and when at least one data of the hue data, saturation data, and brightness data is out of the process permission range, plasma in the process chamber is determined to be in abnormal condition.

11. The apparatus for detecting arc according to claim 1, wherein the apparatus further comprises adaptor and connector for connection between the RGB sensor portion and view port of process chamber.

12. The apparatus for detecting arc according to claim 11, wherein the adaptor has “

+”

shape.

13. The apparatus for detecting arc according to claim 12, wherein the adaptor has gradually protruded shape toward central portion.

14. The apparatus for detecting arc according to claim 13, wherein screw hole is formed in the adaptor, and screw protrusion that has cylindrical shape in which hollow part is formed in central portion is formed in central portion of the connector, the adaptor and the connector is connected by bolt-nut connection type.

15. The apparatus for detecting arc according to claim 13, wherein insert hole is formed in the adaptor, and insert protrusion that has cylindrical shape in which hollow part is formed in central portion is formed in central portion of the connector, the adaptor and the connector is connected by insert connection type.

16. The apparatus for detecting arc according to claim 11, wherein the connector is installed in lower part of the master board, and the RGB module is installed oppositely to the connector in the master board.