Method of manufacturing silicon carbide semiconductor device

• US 20110092063A1
• Filed: 09/09/2010
• Published: 04/21/2011
• Est. Priority Date: 10/20/2009
• Status: Active Grant

• Current Assignee: DENSO Corporation
• Original Assignee: DENSO Corporation
• Inventors: Tsuruta, Kazuhiro, Kawai, Jun
• Granted Patent: US 8,216,929 B2
• Time in Patent Office: Days
• US Class Current: 438/602
• CPC Class Codes: H01L 21/0485 Ohmic electrodes
• CPC Class Codes: H01L 21/268 using electromagnetic radiation, e.g. laser radiation
• CPC Class Codes: H01L 29/1608 Silicon carbide
• CPC Class Codes: H01L 29/34 the imperfections being on the surface
• CPC Class Codes: H01L 29/41766 with at least part of the source or drain electrode having contact below the semiconductor surface, e.g. the source or drain electrode formed at least partially in a groove or with inclusions of conductor inside the semiconductor H01L29/41733 - H01L29/41758 take precedence
• CPC Class Codes: H01L 29/45 Ohmic electrodes
• CPC Class Codes: H01L 29/66068 the devices being controllable only by the electric current supplied or the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched, e.g. three-terminal devices
• CPC Class Codes: H01L 29/7828 without inversion channel, e.g. vertical ACCUFETs, normally-on vertical MISFETs

Abstract

In a method of manufacturing a silicon carbide semiconductor device, a semiconductor substrate made of silicon carbide and having first and second opposing surfaces is prepared. The second surface of the semiconductor substrate is processed so that a surface roughness of the second surface is less than or equal to 10 nm and a value of (100%-reflectance-transmittance) at a wavelength of a laser light is greater than or equal to 80%. A metal layer is formed on the second surface of the semiconductor substrate after the processing the second surface. The metal layer is irradiated with the laser light and thereby an ohmic electrode is formed on the second surface.

Claims

1. A method of manufacturing a silicon carbide semiconductor device that includes a semiconductor substrate and an electrode, the semiconductor substrate made of silicon carbide and having a first surface and a second surface opposing the first surface, the electrode formed on the second surface of the semiconductor substrate and being an ohmic electrode, the method comprising:

preparing the semiconductor substrate and processing the second surface of the semiconductor substrate so that a surface roughness of the second surface is less than or equal to 10 nm and a value of (100%-reflectance-transmittance) at a wavelength of a laser light is greater than or equal to 80%;

forming a metal layer on the second surface of the semiconductor substrate after the processing the second surface; and

forming the electrode by irradiating the metal layer with the laser light.

2. The method according to claim 1, wherein

the processing the second surface includes processing a surface portion of the semiconductor substrate adjacent to the second surface by one of an ion plasma, a sputtering, a laser abrasion, an ion cluster plasma, and an etching.

3. The method according to claim 1, wherein

the forming the metal layer includes forming the metal layer that includes at least one of Ni, Ti, Mo, W, and Ta.

4. The method according to claim 1, wherein

the forming the metal layer includes forming the metal layer that has a thickness of greater than or equal to 10 nm.

5. The method according to claim 1, wherein

the forming the electrode includes irradiating only the metal layer on the second surface with the laser light by one of a scanning and a masking.

6. The method according to claim 1, wherein

the forming the electrode includes irradiating the metal layer with the laser light that has the wavelength less than or equal to 355 nm.

7. The method according to claim 1, wherein

the preparing the semiconductor substrate includes forming an element structure in a first surface side portion of the semiconductor substrate adjacent to the first surface and, forming another electrode on the first surface of the semiconductor substrate, and

the electrode, the element structure, and the another electrode configurate a vertical semiconductor device in which an electric current flows between the electrode and the another electrode.

8. A method of manufacturing a silicon carbide semiconductor device that includes a semiconductor substrate and an electrode, the semiconductor substrate made of silicon carbide and having a first surface and a second surface opposing the first surface, the electrode formed on the second surface of the semiconductor substrate and being an ohmic electrode, the method comprising:

preparing the semiconductor substrate and forming a metal layer on the second surface of the semiconductor substrate;

processing a surface of the metal layer so that a value of (100%-reflectance-transmittance) at a wavelength of a laser light is greater than or equal to 80%; and

forming the electrode by irradiating the metal layer with the laser light after the processing the surface of the metal layer.

9. The method according to claim 8, wherein

the processing the surface of the metal layer includes processing the surface of the metal layer by one of an ion plasma, an etching, and a laser abrasion.

10. The method according to claim 8, wherein

the forming the metal layer includes forming the metal layer that includes at least one of Ni, Ti, Mo, W, and Ta.

11. The method according to claim 8, wherein

the forming the metal layer includes forming the metal layer that has a thickness of greater than or equal to 10 nm.

12. The method according to claim 8, wherein

the forming the electrode includes irradiating only the metal layer on the second surface with the laser light by one of a scanning and a masking.

13. The method according to claim 8, wherein

the forming the electrode includes irradiating the metal layer with the laser light that has the wavelength less than or equal to 355 nm.

14. The method according to claim 8, wherein

the preparing the semiconductor substrate includes forming an element structure in a first surface side portion of the semiconductor substrate adjacent to the first surface and forming another electrode on the first surface of the semiconductor substrate, and

the electrode, the element structure, and the another electrode configurate a vertical semiconductor device in which an electric current flows between the electrode and the another electrode.