SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING THE SAME
First Claim
1. A semiconductor device comprising:
- a hetero structure formed by laying a first semiconductor layer within which a flow path of carriers is formed and a second semiconductor layer made of a material different from that of the first semiconductor layer and laid on the first semiconductor layer; and
an electrode penetrating through the second semiconductor layer, held in contact with the flow path of carriers and tapered so as to make the cross-sectional area parallel to the hetero interface of the hetero structure larger at the side of the second semiconductor layer than at the side of the first semiconductor layer,the device showing relationships of 0°
<
ø
≦
60° and
ø
≠
ø
,where θ
is the acute angle formed by the tangent plane of the lateral surface of the electrode and the hetero interface at a position where the electrode contacts the flow path of charge carriers and 0 is the acute angle formed by the tangent plane of the lateral surface of the electrode and the hetero interface at a position where the electrode contacts the second semiconductor layer above the position where the electrode contacts the flow path of charge carriers on respective cross sections taken along the flow direction of charge carriers.
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Accused Products
Abstract
A semiconductor device reduces the on-resistance and, at the same time, raises the breakdown voltage. The drain electrode 20 of the semiconductor device runs through cap layer 13 and electron supply layer 12 and gets to a position lower than two-dimensional electron gas layer 14 in channel layer 11. Thus, the drain electrode 20 directly contacts the channel layer 11, the electron supply layer 12 and the cap layer 13. Angles (acute angles) θ, ø and ψ are formed by the drain electrode 20 and the channel layer 11, the electron supply layer 12 and the cap layer 13 as viewed in the direction in which a hetero interface is formed (the transverse direction in FIG. 1) and relationships of ø<θ and ø≦ψ are established. In other words, ø is made smallest among the angles and the drain electrode 20 is remarkably tapered particularly at the position of the electron supply layer 12.
34 Citations
10 Claims
-
1. A semiconductor device comprising:
-
a hetero structure formed by laying a first semiconductor layer within which a flow path of carriers is formed and a second semiconductor layer made of a material different from that of the first semiconductor layer and laid on the first semiconductor layer; and an electrode penetrating through the second semiconductor layer, held in contact with the flow path of carriers and tapered so as to make the cross-sectional area parallel to the hetero interface of the hetero structure larger at the side of the second semiconductor layer than at the side of the first semiconductor layer, the device showing relationships of 0°
<
ø
≦
60° and
ø
≠
ø
,where θ
is the acute angle formed by the tangent plane of the lateral surface of the electrode and the hetero interface at a position where the electrode contacts the flow path of charge carriers and 0 is the acute angle formed by the tangent plane of the lateral surface of the electrode and the hetero interface at a position where the electrode contacts the second semiconductor layer above the position where the electrode contacts the flow path of charge carriers on respective cross sections taken along the flow direction of charge carriers. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10)
-
Specification