INKJET NOZZLE WITH PADDLE LAYER ARRANGED BETWEEN FIRST AND SECOND WAFERS

• US 20110096122A1
• Filed: 12/28/2010
• Published: 04/28/2011
• Est. Priority Date: 08/11/1997
• Status: Active Grant

• Current Assignee: Memjet Technology Ltd. (Memjet Limited)
• Original Assignee: Silverbrook Research Pty Limited
• Inventors: Silverbrook, Kia
• Granted Patent: US 8,096,642 B2
• Time in Patent Office: Days
• US Class Current: 347/44
• CPC Class Codes: B41J 2/14314 Structure of ink jet print heads with electrostatically actuated membrane
• CPC Class Codes: B41J 2/14427 Structure of ink jet print heads with thermal bend detached actuators
• CPC Class Codes: B41J 2/16585 for paper-width or non-reciprocating print heads
• CPC Class Codes: B41J 2/17503 Ink cartridges
• CPC Class Codes: B41J 2/17513 Inner structure
• CPC Class Codes: B41J 2/17596 Ink pumps, ink valves
• CPC Class Codes: B41J 2002/041 Electromagnetic transducer
• CPC Class Codes: B41J 2202/21 Line printing
• CPC Class Codes: G06F 21/79 in semiconductor storage media, e.g. directly-addressable memories
• CPC Class Codes: G06F 21/86 Secure or tamper-resistant housings
• CPC Class Codes: G06F 2221/2129 Authenticate client device independently of the user
• CPC Class Codes: G06K 1/121 by printing code marks applying code marks to labels B65C9/46; marking or coding completed packages B65B61/26
• CPC Class Codes: G06K 19/06037 multi-dimensional coding
• CPC Class Codes: G06K 7/14 using light without selection of wavelength, e.g. sensing reflected white light G06K7/10831 - G06K7/1097 take precedence
• CPC Class Codes: G06K 7/1417 2D bar codes
• CPC Class Codes: H04N 1/0044 for image preview or review, e.g. to help the user position a sheet
• CPC Class Codes: H04N 1/2112 using still video cameras
• CPC Class Codes: H04N 1/2154 the still video camera incorporating a hardcopy reproducing device, e.g. a printer
• CPC Class Codes: H04N 2101/00 Still video cameras
• CPC Class Codes: H04N 23/00 Cameras or camera modules comprising electronic image sensors; Control thereof
• CPC Class Codes: H04N 5/2628 : Alteration of picture size, shape, position or orientation, e.g. zooming, rotation, rolling, perspective, translation

Abstract

An inkjet nozzle includes a first wafer having active drive circuitry together with an ink jet print nozzle formed therein; a second wafer having an ink channel formed therein; and a paddle layer sandwiched between the first and second wafers in a chamber complementarily defined by the wafers. The paddle layer is in signal communication with the active drive circuitry so that ink supplied via the ink channel is ejected via the print nozzle upon actuation of the paddle layer by the circuitry. The first wafer includes a silicon wafer upon which is fabricated an epitaxial boron doped layer, an epitaxial silicon layer, drive transistors and distribution circuitry forming a CMOS logic and drive transistor level, and a silicon nitride layer.

Claims

1. An inkjet nozzle comprising:

a first wafer having active drive circuitry together with an ink jet print nozzle formed therein;

a second wafer having an ink channel formed therein; and

a paddle layer sandwiched between the first and second wafers in a chamber complementarily defined by the wafers, the paddle layer in signal communication with the active drive circuitry, so that ink supplied via the ink channel is ejected via the print nozzle upon actuation of the paddle layer by the circuitry, wherein

the first wafer includes a silicon wafer upon which is fabricated an epitaxial boron doped layer, an epitaxial silicon layer, drive transistors and distribution circuitry forming a CMOS logic and drive transistor level, and a silicon nitride layer.

2. The inkjet nozzle of claim 1, wherein the paddle layer includes two solenoid coil paddles arranged on top of each other, said coil paddles thermally expanding upon activation by the drive circuitry to eject the ink.

3. The inkjet nozzle of claim 2, wherein the paddle layer is constructed utilizing a damascene process utilizing chemical mechanical polishing techniques.