FLUID DISTRIBUTION MANIFOLD INCLUDING NON-PARALLEL NON-PERPENDICULAR SLOTS
First Claim
Patent Images
1. A fluid conveyance device for thin film material deposition comprising:
- a substrate transport mechanism that causes a substrate to travels in a direction; and
a fluid distribution manifold including an output face, the output face including a plurality of elongated slots, at least one of the elongated slots including a portion that is non-perpendicular and non-parallel relative to the direction of substrate travel.
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Abstract
A fluid conveyance device for thin film material deposition includes a substrate transport mechanism that causes a substrate to travels in a direction. A fluid distribution manifold includes an output face. The output face includes a plurality of elongated slots. At least one of the elongated slots includes a portion that is non-perpendicular and non-parallel relative to the direction of substrate travel.
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Citations
7 Claims
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1. A fluid conveyance device for thin film material deposition comprising:
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a substrate transport mechanism that causes a substrate to travels in a direction; and a fluid distribution manifold including an output face, the output face including a plurality of elongated slots, at least one of the elongated slots including a portion that is non-perpendicular and non-parallel relative to the direction of substrate travel. - View Dependent Claims (2, 3, 4, 5)
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6. A method of depositing a thin film material on a substrate comprising:
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providing a substrate; providing a fluid conveyance device including; a substrate transport mechanism that causes a substrate to travels in a direction; and a fluid distribution manifold including an output face, the output face including a plurality of elongated slots, at least one of the elongated slots including a portion that is non-perpendicular and non-parallel relative to the direction of substrate travel; and causing a gaseous material to flow from the plurality of elongated slots of the output face of the fluid distribution manifold toward the substrate.
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7. A fluid conveyance device for thin film material deposition comprising:
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a substrate transport mechanism that causes a substrate to travels in a direction; and a fluid distribution manifold including an output face, the output face including a plurality of elongated slots, at least one of the elongated slots including an overall shape that is not completely perpendicular or completely parallel relative to the direction of substrate travel.
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Specification