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PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD

  • US 20110097516A1
  • Filed: 01/05/2011
  • Published: 04/28/2011
  • Est. Priority Date: 07/11/2008
  • Status: Abandoned Application
First Claim
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1. A plasma processing apparatus comprising:

  • a plasma generator configured to generate plasma; and

    a conveyor configured to adjust a distance between a substrate and the plasma generator.

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