ARRAY SUBSTRATE FOR LIQUID CRYSTAL DISPLAY DEVICE AND METHOD OF FABRICATING THE SAME
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Abstract
An array substrate for a liquid crystal display device includes a gate line and a data line crossing each other on a substrate to define a pixel region, an insulating layer between the gate line and the data line, a gate electrode extending from the gate line, and a transistor in the pixel region having an active layer on the insulating layer, ohmic contact layers of a first material that are adjacent to ends of the active layer, buffer layers of a second material, which is different from the first material, on the ohmic contact layers, a source electrode contacting one of the buffer layers and a drain electrode contacting another one of the buffer layers, wherein the active layer is in an island shape over the gate electrode and within a boundary defined by a perimeter of the gate electrode.
10 Citations
30 Claims
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1-18. -18. (canceled)
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19. A method of fabricating an array substrate for a liquid crystal display device, comprising:
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forming a gate electrode on a substrate and a gate line connected to the gate electrode; forming a first insulating layer on the gate line and gate electrode; forming an active layer on the first insulating layer; forming an ohmic contact layer on the active layer; patterning the active layer and the ohmic contact layer to form an island shape over the gate electrode and within a boundary defined by a perimeter of the gate electrode having an active layer pattern; forming a transparent conductive material layer and an opaque conductive material layer over the island shape; patterning the transparent conductive material layer and the opaque conductive material layer to form source and drain electrodes; patterning the ohmic contact pattern to form ohmic contact layers adjacent to the ends of the active layer under the source and electrodes; forming a second insulating layer over the substrate; and patterning the second insulating layer and the opaque conductive material layer of the drain electrode to form the pixel electrode. - View Dependent Claims (20, 21)
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22. A method of fabricating an array substrate for a liquid crystal display device, comprising:
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forming a gate electrode, a gate line connected to the gate electrode and a gate pad at one end of the gate line through a first mask process; forming a first insulating layer, an active layer and an ohmic contact pattern on the gate electrode through a second mask process, the first gate insulating layer exposing the gate pad; forming source and drain electrodes on the ohmic contact pattern, a pixel pattern connected to the drain electrode, a data line connected to the source electrode, a data pad pattern at one end of the data line and a gate pad terminal pattern contacting the gate pad through a third mask process, the pixel pattern including a first pixel metal layer of a transparent conductive material and a second pixel metal layer of an opaque conductive material, the data pad pattern including a first data pad metal layer of the transparent conductive material and a second data pad metal layer of the opaque conductive material, the gate pad terminal pattern including a first gate pad terminal metal layer of the transparent conductive material and a second gate pad terminal metal layer of the opaque conductive material; and removing the second pixel pattern metal layer, the second gate pad terminal metal layer and the second data pad metal layer through a fourth mask process to form a pixel electrode of the first pixel pattern metal layer, a gate pad terminal of the first gate pad terminal metal layer and a data pad of the first data pad metal layer. - View Dependent Claims (23, 24, 25, 26, 27, 28, 29, 30)
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Specification