DUAL MODE INDUCTIVELY COUPLED PLASMA REACTOR WITH ADJUSTABLE PHASE COIL ASSEMBLY

• US 20110097901A1
• Filed: 06/23/2010
• Published: 04/28/2011
• Est. Priority Date: 10/26/2009
• Status: Abandoned Application

• Current Assignee: Applied Materials Incorporated
• Original Assignee: Applied Materials Incorporated
• Inventors: PAL, ANNIRUDDHA, RAUF, SHAHID, NGUYEN, ANDREW, COLLINS, KENNETH S., AGARWAL, ANKUR, BANNA, SAMER, SALINAS, MARTIN JEFF, WANG, TSE-CHIANG, CHEN, ZHIGANG, TODOROW, VALENTIN N.
• Application Number:
  US12/821,636
• Publication Number:
  US 20110097901A1
• Time in Patent Office: Days
• US Class Current: 438/710
• CPC Class Codes: H01J 37/321 the radio frequency energy being inductively coupled to the plasma
• CPC Class Codes: H01J 37/3211 Antennas, e.g. particular shapes of coils
• CPC Class Codes: H01J 37/32165 Plural frequencies
• CPC Class Codes: H01J 37/32174 Circuits specially adapted for controlling the RF discharge

Abstract

Embodiments of dual mode inductively coupled plasma reactors and methods of use of same are provided herein. In some embodiments, a dual mode inductively coupled plasma processing system may include a process chamber having a dielectric lid and a plasma source assembly disposed above the dielectric lid. The plasma source assembly includes a plurality of coils configured to inductively couple RF energy into the process chamber to form and maintain a plasma therein, a phase controller for adjusting the relative phase of the RF current applied to each coil in the plurality of coils, and an RF generator coupled to the phase controller and the plurality of coils.

Claims

1. A dual mode inductively coupled plasma processing system, comprising:

a process chamber having a dielectric lid; and

a plasma source assembly disposed above the dielectric lid, the plasma source assembly comprising;

a plurality of coils configured to inductively couple RF energy into the process chamber to form and maintain a plasma therein;

a phase controller coupled to the plurality of coils for controlling the relative phase of RF current applied to each coil in the plurality of coils; and

an RF generator coupled to the phase controller.

2. The system of claim 1, wherein the plurality of coils further comprise:

an outer coil; and

an inner coil.

3. The system of claim 1, wherein the plasma source assembly comprises one or more electrodes configured to capacitively couple RF energy into the process chamber to form the plasma therein, wherein the one or more electrodes are electrically coupled to one of the one or more coils.

4. The system of claim 3, wherein the one or more electrodes further comprise:

two electrodes equidistantly spaced apart and disposed between the inner coil and the outer coil, wherein each electrode is electrically coupled to the outer coil.

5. The system of claim 1, wherein the phase controller further comprises:

a capacitive divider having a fixed capacitor and a variable capacitor.

6. The system of claim 5, wherein the plurality of coils are connected in series, wherein the plurality of coils comprise an inner coil wound in a first direction and an outer coil wound in a second direction, where the first and second directions are opposite each other.

7. The system of claim 1, further comprising:

a heater element disposed between the dielectric lid and the one or more electrodes of the plasma source assembly.

8. The system of claim 1, wherein the phase controller selectively supplies in-phase RF current and 180 degree out-of-phase RF current to the plurality of coils.

9. The system of claim 1, further comprising:

a support pedestal disposed within the process chamber having a bias power source coupled thereto.

10. The system of claim 1, wherein the phase controller further comprises:

a power divider disposed between the RF generator and the plurality of coils; and

a capacitor coupled between one of the plurality of coils and ground.

11. The system of claim 10, wherein the plurality of coils are connected in parallel.

12. A method of forming and using a plasma, comprising:

providing a process gas to an inner volume of a process chamber having a dielectric lid and having a plurality of coils disposed above the lid;

providing RF power to the plurality of coils from an RF power source;

forming a plasma from the process gas using the RF power provided by the RF power source that is inductively to the process gas by the plurality of coils; and

adjusting the relative phase of RF current applied to each coil in the plurality of coils.

13. The method of claim 12, wherein:

the plurality of coils comprises two coils and the adjusting selectively supplies RF current in-phase to each of the coils or 180 degrees out-of-phase to each of the coils;

or

the adjusting further comprises altering at least one capacitance value of a capacitor in a capacitive divider that splits RF current amongst the plurality of coils.

14. The method of claim 12, further comprising providing RF power to at least one electrode coupled to at least one of the plurality of coils.

15. The method of claim 12, wherein the process chamber further comprises a heater element disposed atop the lid, and further comprising:

supplying power to the heater element from a AC power supply to control a temperature of the process chamber.

16. A dual mode inductively coupled plasma processing system, comprising:

a process chamber having a dielectric lid;

an annular heater positioned proximate the dielectric lid;

a plasma source assembly disposed above the dielectric lid, the plasma source assembly comprising;

a first coil being would in a first direction and a second coil being would in a second direction, the first and second coils configured to inductively couple RF energy into the process chamber to form and maintain a plasma therein;

a phase controller coupled to the first and second coils for controlling the relative phase of RF current applied to each coil;

one or more electrodes configured to capacitively couple RF energy into the process chamber to form the plasma therein, wherein the one or more electrodes are electrically coupled to one of the one or more coils; and

an RF generator coupled to the phase controller and each of the coils through a central feed.

17. The system of claim 16, wherein the first direction and second direction are opposite one another.

18. The system of claim 16, wherein the first coil and the second coil are coupled in series with a blocking capacitor to ground coupled between the first coil and the second coil.

19. The system of claim 18, wherein the one or more electrodes are formed by connectors coupling the first coil and the second coil.

20. The system of claim 18, further comprising:

a match network coupled between the RF generator and the first and second coils, the match network having a dividing capacitor, wherein the dividing capacitor and the blocking capacitor together comprise the phase controller, wherein the phase controller controls the current ratio in addition to the relative phase of the RF current flowing through the first and second coils.