MULTIPLE-SIDED CMP PAD CONDITIONING DISK
First Claim
1. A conditioning tool for restoring a used CMP polishing pad to an operable condition, comprising:
- (a) a substrate having a peripheral edge and a first substantially planar major surface with a first abrasive mounted thereon and at least a second, oppositely facing, substantially planar major surface with a second abrasive mounted thereon;
(b) a base for drivingly linking to a rotatably driven machine, the base having a base surface; and
(c) at least one fastener mounting the substrate to the base with the second abrasive spaced from the base surface to form a gap between the base surface and the second abrasive, and the first abrasive facing away from the base.
1 Assignment
0 Petitions
Accused Products
Abstract
A conditioning tool for restoring a used CMP polishing pad to an operable condition. The tool includes a base that attaches to a driven machine and has a surface from which a shoulder protrudes that receives a peripheral edge of a disk. The disk has two opposing surfaces, each of which is substantially planar and has abrasive mounted thereon. The disk'"'"'s peripheral edge is held in place between the base shoulder and a ring that has a shoulder that is complementary to the disk'"'"'s peripheral edge. The ring is fastened to the base with the abrasive of the first disk surface protruding through an aperture in the ring, and the opposing disk surface spaced from the base'"'"'s surface. After the disk'"'"'s first surface is worn, the disk can be turned around to expose the opposite surface'"'"'s abrasive to a CMP pad.
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Citations
25 Claims
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1. A conditioning tool for restoring a used CMP polishing pad to an operable condition, comprising:
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(a) a substrate having a peripheral edge and a first substantially planar major surface with a first abrasive mounted thereon and at least a second, oppositely facing, substantially planar major surface with a second abrasive mounted thereon; (b) a base for drivingly linking to a rotatably driven machine, the base having a base surface; and (c) at least one fastener mounting the substrate to the base with the second abrasive spaced from the base surface to form a gap between the base surface and the second abrasive, and the first abrasive facing away from the base. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13)
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14. An improved conditioning tool for restoring a used CMP polishing pad to an operable condition including a disk with a circular peripheral edge and a first substantially planar surface to which a first abrasive is attached and a drive mount for drivingly linking to a rotatably driven machine, the improvement comprising:
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(a) the disk having a second, opposing substantially planar surface to which a second abrasive is attached, thereby forming two opposing, substantially planar abrasive surfaces; (b) a base on which the drive mount is formed, the base having a circular shoulder extending from a base surface substantially opposite the drive mount, a base shoulder diameter being substantially equal to a diameter of the circular peripheral edge of the disk and receiving at least a portion of the peripheral edge of the disk; (c) a ring having an annular body with a circular shoulder defining an aperture having a diameter that is smaller than the diameter of the peripheral edge of the disk, the ring shoulder diameter being substantially equal to the diameter of the peripheral edge of the disk and receiving at least a portion of the peripheral edge of the disk; and (d) at least one fastener mounting the ring to the base with the disk held between the ring and the base by a clamping force applied to the peripheral edge of the disk by the ring shoulder and the base shoulder, wherein the first abrasive protrudes through the aperture of the ring, and the second abrasive is spaced from the base surface. - View Dependent Claims (15, 16)
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17. A conditioning tool for restoring a used CMP polishing pad to an operable condition, comprising:
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(a) a disk having a circular peripheral edge, a first substantially planar surface to which a first abrasive is attached and a second, opposing substantially planar surface to which a second abrasive is attached, thereby forming two opposing, substantially planar abrasive surfaces, the circular peripheral edge including a first surface and a second surface; (b) a base for drivingly linking to a rotatably driven machine, the base having a circular shoulder extending from a base surface, a shoulder diameter being substantially equal to a diameter of the circular peripheral edge of the disk and receiving the first surface of the peripheral edge of the disk; (c) a ring having an annular body with a circular shoulder defining an aperture having a diameter that is smaller than the diameter of the peripheral edge of the disk, the ring shoulder diameter being substantially equal to the diameter of the peripheral edge of the disk and receiving the second surface of the peripheral edge of the disk; and (d) at least one fastener mounting the ring to the base with the disk held between the ring and the base by a clamping force applied to the peripheral edge of the disk by the ring shoulder and the base shoulder, wherein the first abrasive protrudes through the aperture of the ring, and the second abrasive is spaced from the base surface. - View Dependent Claims (18, 19)
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20. A conditioning tool for restoring a used CMP polishing pad to an operable condition, comprising:
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(a) a substrate having a peripheral edge and a first substantially planar major surface with a first abrasive mounted thereon and at least a second, oppositely facing, substantially planar major surface with a second abrasive mounted thereon; (b) a base for drivingly linking to a rotatably driven machine, the base having a base surface; and (c) means for mounting the substrate to the base with the second abrasive spaced from the base surface to form a gap between the base surface and the second abrasive, and the first abrasive faces away from the base. - View Dependent Claims (21)
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22. A method of restoring a used CMP polishing pad to an operable condition, the method comprising:
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(b) drivingly linking a base to a rotatably driven machine, the base having a circular shoulder extending from a base surface, a shoulder diameter being substantially equal to a diameter of the circular peripheral edge of the disk; (a) disposing a circular peripheral edge of a disk against the base'"'"'s shoulder, the disk having a first substantially planar surface to which a first abrasive is attached and a second, opposing substantially planar surface to which a second abrasive is attached, thereby forming two opposing, substantially planar abrasive surfaces; and (c) mounting a ring to the base, the ring having an annular body with a circular shoulder defining an aperture having a diameter that is smaller than the diameter of the peripheral edge of the disk, the ring shoulder diameter being substantially equal to the diameter of the peripheral edge of the disk and receiving at least a portion of the peripheral edge of the disk; (d) clamping the disk between the ring and the base by a clamping force applied to the peripheral edge of the disk by the ring shoulder and the base shoulder, wherein the first abrasive protrudes through the aperture of the ring, and the second abrasive is spaced from the base surface. - View Dependent Claims (23)
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24. A conditioning tool for restoring a used CMP polishing pad to an operable condition, comprising:
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(a) a disk having a circular peripheral edge, a first substantially planar surface to which a first abrasive is attached and a second, opposing substantially planar surface to which a second abrasive is attached, thereby forming two opposing, substantially planar abrasive surfaces, the circular peripheral edge including a first surface that faces toward a second surface; (b) a base for drivingly linking to a rotatably driven machine, the base having a circular shoulder extending from a base surface, a shoulder diameter being substantially equal to a diameter of the circular peripheral edge of the disk and receiving the first surface of the peripheral edge of the disk; (c) a ring having an annular body with a circular shoulder defining an aperture having a diameter that is smaller than the diameter of the peripheral edge of the disk, the ring shoulder diameter being substantially equal to the diameter of the peripheral edge of the disk and receiving the second surface of the peripheral edge of the disk; and (d) at least one fastener mounting the ring to the base with the disk held between the ring and the base, wherein the first abrasive protrudes through the aperture of the ring, and the second abrasive is spaced from the base surface.
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25. A holder for a conditioning tool for restoring a used CMP polishing pad to an operable condition, the holder comprising:
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(a) a base for drivingly linking to a rotatably driven machine, the base having a circular shoulder extending from a base surface configured to receive a disk having (i) a circular peripheral edge including a first surface and a second surface; (ii) a first substantially planar surface to which a first abrasive is attached; and (iii) a second, opposing substantially planar surface to which a second abrasive is attached, thereby forming two opposing, substantially planar abrasive surfaces, a shoulder diameter being substantially equal to a diameter of the circular peripheral edge of the disk for receiving the first surface of the peripheral edge of the disk; (b) a ring having an annular body with a circular shoulder defining an aperture having a diameter that is smaller than the diameter of the peripheral edge of the disk, the ring shoulder diameter being substantially equal to the diameter of the peripheral edge of the disk for receiving the second surface of the peripheral edge of the disk; and (c) at least one fastener for mounting the ring to the base with the disk held between the ring and the base by a clamping force applied to the peripheral edge of the disk by the ring shoulder and the base shoulder, wherein the first abrasive protrudes through the aperture of the ring, and the second abrasive is spaced from the base surface.
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Specification