SYSTEM AND METHOD FOR MONITORING OPERATION OF A PUMP

• US 20110098864A1
• Filed: 01/03/2011
• Published: 04/28/2011
• Est. Priority Date: 12/02/2005
• Status: Active Grant

• Current Assignee: Entegris Incorporated
• Original Assignee: Entegris Incorporated
• Inventors: Cedrone, James, Gonnella, George
• Granted Patent: US 8,382,444 B2
• Time in Patent Office: Days
• US Class Current: 700/282
• CPC Class Codes: F04B 1/08 regulated by delivery pressure
• CPC Class Codes: F04B 13/00 Pumps specially modified to deliver fixed or variable measured quantities
• CPC Class Codes: F04B 2203/0209 Rotational speed
• CPC Class Codes: F04B 2205/01 Pressure before the pump inlet
• CPC Class Codes: F04B 2205/03 Pressure in the compression chamber
• CPC Class Codes: F04B 2205/04 Pressure in the outlet chamber
• CPC Class Codes: F04B 23/04 Combinations of two or more pumps
• CPC Class Codes: F04B 23/06 the pumps being all of reciprocating positive-displacement type
• CPC Class Codes: F04B 41/06 Combinations of two or more pumps
• CPC Class Codes: F04B 43/088 with two or more tubular flexible members in series F04B43/1133 takes precedence
• CPC Class Codes: F04B 49/06 Control using electricity regulating by means of floats actuating electric switches F04B49/04
• CPC Class Codes: F04B 49/065 and making use of computers
• CPC Class Codes: F04B 49/08 Regulating by delivery pressure
• CPC Class Codes: F04B 49/103 Responsive to speed
• CPC Class Codes: F04B 51/00 Testing machines, pumps, or pumping installations

Abstract

Systems and methods for monitoring operation of a pump, including verifying operation or actions of a pump, are disclosed. A baseline profile for one or more parameters of a pump may be established. An operating profile may then be created by recording one or more values for the same set of parameters during subsequent operation of the pump. The values of the baseline profile and the operating profile may then be compared at one or more points or sets of points. If the operating profile differs from the baseline profile by more than a certain tolerance an alarm may be sent or another action taken, for example the pumping system may shut down, etc.

Claims

1. A method for controlling fluid pressure in a multiple stage (multi-stage) pump

comprising:

accessing a baseline profile for a known good dispense cycle, wherein the baseline profile provides a profile of an operating parameter of the multi-stage pump;

operating a feed pump, a dispense pump and a set of valves to perform a new dispense

cycle including multiple segments;

continually determining values of the operating parameter during the new dispense cycle;

creating a first operating profile for the operating parameter using the values of the operating parameter;

comparing the first operating profile with the baseline profile to confirm the new dispense cycle resulted in a good dispense; and

if a gpod dispense did not occur, performing one or more of sending an alarm and changing the operation of the system;

wherein operating the feed pump, dispense pump and set of valves to perform the new dispense cycle comprises;

operating the feed pump to reduce a volume of a feed chamber at a first

predetermined rate;

opening a barrier valve to allow a fluid in the feed chamber to enter a dispense

chamber while keeping an outlet valve closed so that none of the fluid entering the dispense

chamber is dispensed;

taking pressure measurements of the fluid in using a pressure sensor;

determining whether a first pressure measurement is greater than a predetermined

pressure;

in response to the first pressure measurement being greater than said

predetermined pressure, operating a dispense pump to increase a volume of the dispense

chamber at a second predetermined rate;

taking a second pressure measurement while the dispense pump is operating to

increase the volume of the dispense chamber;

determining whether the second pressure measurement is greater than a first

threshold or less than a second threshold;

in response to determining that the second pressure measurement is greater than

the first pressure threshold, operating the feed pump at a decreased speed;

in response to determining that the second pressure measurement is less than the

second threshold, operating the feed pump at an increased speed;

determining whether the operation of the dispense pump has caused the volume of

the dispense chamber to reach a predetermined volume;

in response to determining that the volume of the dispense chamber has not

reached the predetermined volume, repeating the method from the step of measuring the second

pressure; and

in response to determining that the volume of the dispense chamber has reached

the predetermined volume, stopping the operation of the feed pump and the dispense pump.

2. The method of claim 1, wherein the operating parameter comprises a pressure in the multi-stage pump.

3. The method of claim 1, wherein the operating parameter comprises a motor speed,

4. The method of claim 1, wherein the operating parameter comprises a motor position.

5. The method of claim 1, wherein the operating parameter comprises a current supplied to a motor.

6. A multiple stage pump comprising:

a feed pump comprising;

a feed chamber;

a first diaphragm movable in the feed chamber;

a first lead screw to move the first diaphragm;

a first motor coupled to the first lead screw to rotate the first lead screw;

a dispense puMp fluidly coupled to the feed pump, the dispense pump comprising;

a dispense chamber;

a second diaphragm movable in the dispense chamber;

a second lead screw to move the second diaphragm;

a second motor coupled to the second lead screw to rotate the second lead screw;

a filter disposed in a fluid flow path between the feed pump and the dispense pump;

a set of valves further comprising;

an inlet valve;

an isolation valve;

a barrier valve;

an outlet valve;

a pressure sensor positioned to measure pressure in the multi-stage pump; and

a pump controller comprising a processor and a tangible, non-transitory computer readable

medium storing a set of instructions executable to cause the controller to;

access a baseline profile for a known good dispense cycle, wherein the baseline profile provides a profile of an operating parameter of the multi-stage pump;

operate the feed pump, a dispense pump and a set of valves to perform a new dispense

cycle including multiple segments;

continually determine values of the operating parameter during the new dispense cycle;

create a first operating profile for the operating parameter using the values of the operating parameter;

compare the first operating profile with the baseline profile to confirm the new dispense cycle resulted in a good dispense; and

if a good dispense did not occur, perform one or more of sending an alarm and changing the operation of the system;

wherein operating the feed pump, dispense pump and set of valves to perform the new dispense cycle comprises;

operating the feed pump to reduce a volume of a feed chamber at a first

predetermined rate;

opening a barrier valve to allow a fluid in the feed chamber to enter a dispense

chamber while keeping an outlet valve closed so that none of the fluid entering the dispense

chamber is dispensed;

taking pressure measurements of the fluid in using the pressure sensor;

determining whether a first pressure measurement is greater than a predetermined

pressure;

in response to the first pressure measurement being greater than said

predetermined pressure, operating the dispense pump to increase a volume of the dispense

chamber at a second predetermined rate;

taking a second pressure measurement while the dispense pump is operating to

increase the volume of the dispense chamber;

determining whether the second pressure measurement is greater than a first

threshold or less than a second threshold;

in response to determining that the second pressure measurement is greater than

the first pressure threshold, operating the feed pump at a decreased speed;

in response to determining that the second pressure measurement is less than the

second threshold, operating the feed pump at an increased speed;

determining whether the operation of the dispense pump has caused the volume of

the dispense chamber to reach a predetermined volume;

in response to determining that the volume of the dispense chamber has not

reached the predetermined volume, repeating the method from the step of measuring the second

pressure; and

in response to determining that the volume of the dispense chamber has reached

the predetermined volume, stopping the operation of the feed pump and the dispense pump.

7. The multi-stage pump of claim 6, wherein the operating parameter comprises a pressure in the multi-stage pump.

8. The multi-stage pump of claim 6, wherein the operating parameter comprises a motor speed,

9. The multi-stage pump of claim 6, wherein the operating parameter comprises a motor position.

10. The multi-stage pump of claim 6, wherein the operating parameter comprises a current supplied to a motor.

11. A computer program product comprising a tangible, non-transitory

computer readable medium storing instructions executable to perform a method of controlling a

multiple stage pump, the method comprising:

accessing a baseline profile for a known good dispense cycle, wherein the baseline profile provides a profile of an operating parameter of the multi-stage pump;

operating a feed pump, a dispense pump and a set of valves to perform a new dispense

cycle including multiple segments;

continually determining values of the operating parameter during the new dispense cycle;

creating a first operating profile for the operating parameter using the values of the operating parameter;

comparing the first operating profile with the baseline profile to confirm the new dispense cycle resulted in a good dispense; and

if a good dispense did not occur, performing one or more of sending an alarm and changing the operation of the system;

wherein operating the feed pump, dispense pump and set of valves to perform the new dispense cycle comprises;

operating the feed pump to reduce a volume of a feed chamber at a first

predetermined rate;

opening a barrier valve to allow a fluid in the feed chamber to enter a dispense

chamber while keeping an outlet valve closed so that none of the fluid entering the dispense

chamber is dispensed;

taking pressure measurements of the fluid in using a pressure sensor;

determining whether a first pressure measurement is greater than a predetermined

pressure;

in response to the first pressure measurement being greater than said

predetermined pressure, operating a dispense pump to increase a volume of the dispense

chamber at a second predetermined rate;

taking a second pressure measurement while the dispense pump is operating to

increase the volume of the dispense chamber;

determining whether the second pressure measurement is greater than a first

threshold or less than a second threshold;

in response to determining that the second pressure measurement is greater than

the first pressure threshold, operating the feed pump at a decreased speed;

in response to determining that the second pressure measurement is less than the

second threshold, operating the feed pump at an increased speed;

determining whether the operation of the dispense pump has caused the volume of

the dispense chamber to reach a predetermined volume;

in response to determining that the volume of the dispense chamber has not

reached the predetermined volume, repeating the method from the step of measuring the second

pressure; and

in response to determining that the volume of the dispense chamber has reached

the predetermined volume, stopping the operation of the feed pump and the dispense pump.

12. The computer program product of claim 11, wherein the operating parameter comprises a pressure in the multi-stage pump.

13. The computer program product of claim 11, wherein the operating parameter comprises a motor speed,

14. The computer program product of claim 11, wherein the operating parameter comprises a motor position.

15. The computer program product of claim 11, wherein the operating parameter comprises a current supplied to a motor.