POWER DIODE, RECTIFIER, AND SEMICONDUCTOR DEVICE INCLUDING THE SAME
First Claim
1. A power diode comprising a plurality of non-linear elements, each of the plurality of non-linear elements comprising:
- a first electrode provided over a substrate;
an oxide semiconductor film provided on and in contact with the first electrode;
a second electrode provided on and in contact with the oxide semiconductor film;
a gate insulating film covering the first electrode, the oxide semiconductor film, and the second electrode; and
a third electrode provided in contact with the gate insulating film and adjacent to a side surface of the oxide semiconductor film, the third electrode being connected to the first electrode or the second electrode,wherein the plurality of non-linear elements is connected in series in a forward direction.
1 Assignment
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Accused Products
Abstract
With a non-linear element (e.g., a diode) with small reverse saturation current, a power diode or rectifier is provided. A non-linear element includes a first electrode provided over a substrate, an oxide semiconductor film provided on and in contact with the first electrode and having a concentration of hydrogen of 5×1019 atoms/cm3 or less, a second electrode provided on and in contact with the oxide semiconductor film, a gate insulating film covering the first electrode, the oxide semiconductor film, and the second electrode, and third electrodes provided in contact with the gate insulating film and facing each other with the first electrode, the oxide semiconductor film, and the second electrode interposed therebetween or a third electrode provided in contact with the gate insulating film and surrounding the second electrode. The third electrodes are connected to the first electrode or the second electrode. With the non-linear element, a power diode or a rectifier is formed.
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Citations
54 Claims
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1. A power diode comprising a plurality of non-linear elements, each of the plurality of non-linear elements comprising:
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a first electrode provided over a substrate; an oxide semiconductor film provided on and in contact with the first electrode; a second electrode provided on and in contact with the oxide semiconductor film; a gate insulating film covering the first electrode, the oxide semiconductor film, and the second electrode; and a third electrode provided in contact with the gate insulating film and adjacent to a side surface of the oxide semiconductor film, the third electrode being connected to the first electrode or the second electrode, wherein the plurality of non-linear elements is connected in series in a forward direction. - View Dependent Claims (2, 3, 4, 5, 6)
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7. A power diode comprising a plurality of non-linear elements, each of the plurality of non-linear elements comprising:
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a plurality of first electrodes provided over a substrate; an oxide semiconductor film provided on and in contact with the plurality of first electrodes; a second electrode provided on and in contact with the oxide semiconductor film; a gate insulating film covering the plurality of first electrodes, the oxide semiconductor film, and the second electrode; and a third electrode provided in contact with the gate insulating film and adjacent to a side surface of the oxide semiconductor film, the third electrode being connected to any of the plurality of first electrodes or the second electrode, wherein the plurality of non-linear elements is connected in series in a forward direction. - View Dependent Claims (8, 9, 10, 11, 12)
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13. A power diode comprising a plurality of non-linear elements, each of the plurality of non-linear elements comprising:
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a first electrode provided over a substrate; an oxide semiconductor film provided on and in contact with the first electrode; a second electrode provided on and in contact with the oxide semiconductor film; a gate insulating film covering the first electrode, the oxide semiconductor film, and the second electrode; and a third electrode having a ring shape, the third electrode being provided in contact with the gate insulating film and adjacent to a side surface of the oxide semiconductor film, the third electrode surrounding the second electrode, and the third electrode being connected to the first electrode or the second electrode, wherein the plurality of non-linear elements is connected in series in a forward direction. - View Dependent Claims (14, 15, 16, 17, 18)
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19. A rectifier comprising a first non-linear element and a second non-linear element, each of the first non-linear element and the second non-linear element comprising:
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a first electrode provided over a substrate; an oxide semiconductor film provided on and in contact with the first electrode; a second electrode provided on and in contact with the oxide semiconductor film; a gate insulating film covering the first electrode, the oxide semiconductor film, and the second electrode; and a third electrode provided in contact with the gate insulating film and adjacent to a side surface of the oxide semiconductor film, the third electrode being connected to the first electrode or the second electrode, wherein an anode of the first non-linear element is connected to a lower potential side reference potential, wherein a cathode of the first non-linear element is connected to an input portion and an anode of the second non-linear element, and wherein a cathode of the second non-linear element is connected to an output portion. - View Dependent Claims (20, 21, 22, 23, 24)
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25. A rectifier comprising a first non-linear element and a second non-linear element, each of the first non-linear element and the second non-linear element comprising:
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a plurality of first electrodes provided over a substrate; an oxide semiconductor film provided on and in contact with the plurality of first electrodes; a second electrode provided on and in contact with the oxide semiconductor film; a gate insulating film covering the plurality of first electrodes, the oxide semiconductor film, and the second electrode; and a third electrode provided in contact with the gate insulating film and adjacent to a side surface of the oxide semiconductor film, the third electrode being connected to any of the plurality of first electrodes or the second electrode, wherein an anode of the first non-linear element is connected to a lower potential side reference potential, wherein a cathode of the first non-linear element is connected to an input portion and an anode of the second non-linear element, and wherein a cathode of the second non-linear element is connected to an output portion. - View Dependent Claims (26, 27, 28, 29, 30)
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31. A rectifier comprising a first non-linear element and a second non-linear element, each of the first non-linear element and the second non-linear element comprising:
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a first electrode provided over a substrate; an oxide semiconductor film provided on and in contact with the first electrode; a second electrode provided on and in contact with the oxide semiconductor film; a gate insulating film covering the first electrode, the oxide semiconductor film, and the second electrode; and a third electrode having a ring shape, the third electrode being provided in contact with the gate insulating film and adjacent to a side surface of the oxide semiconductor film, the third electrode surrounding the second electrode, and the third electrode being connected to the first electrode or the second electrode, wherein an anode of the first non-linear element is connected to a lower potential side reference potential, wherein a cathode of the first non-linear element is connected to an input portion and an anode of the second non-linear element, and wherein a cathode of the second non-linear element is connected to an output portion. - View Dependent Claims (32, 33, 34, 35, 36)
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37. A rectifier comprising first to fourth non-linear elements, each of the first to fourth non-linear elements comprising:
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a first electrode provided over a substrate; an oxide semiconductor film provided on and in contact with the first electrode; a second electrode provided on and in contact with the oxide semiconductor film; a gate insulating film covering the first electrode, the oxide semiconductor film, and the second electrode; and a third electrode provided in contact with the gate insulating film and adjacent to a side surface of the oxide semiconductor film, the third electrode being connected to the first electrode or the second electrode, wherein an anode of the first non-linear element is connected to a lower potential side reference potential, and a cathode of the first non-linear element is connected to an input portion, wherein an anode of the second non-linear element is connected to the input portion, and a cathode of the second non-linear element is connected to a higher potential side reference potential, wherein an anode of the third non-linear element is connected to the lower potential side reference potential, and a cathode of the third non-linear element is connected to an output portion, and wherein an anode of the fourth non-linear element is connected to the output portion, and a cathode of the fourth non-linear element is connected to the higher potential side reference potential. - View Dependent Claims (38, 39, 40, 41, 42)
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43. A rectifier comprising first to fourth non-linear elements, each of the first to fourth non-linear elements comprising:
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a plurality of first electrodes provided over a substrate; an oxide semiconductor film provided on and in contact with the plurality of first electrodes; a second electrode provided on and in contact with the oxide semiconductor film; a gate insulating film covering the plurality of first electrodes, the oxide semiconductor film, and the second electrode; and a third electrode provided in contact with the gate insulating film and adjacent to a side surface of the oxide semiconductor film, the third electrode being connected to any of the plurality of first electrodes or the second electrode, wherein an anode of the first non-linear element is connected to a lower potential side reference potential, and a cathode of the first non-linear element is connected to an input portion, wherein an anode of the second non-linear element is connected to the input portion, and a cathode of the second non-linear element is connected to a higher potential side reference potential, wherein an anode of the third non-linear element is connected to the lower potential side reference potential, and a cathode of the third non-linear element is connected to an output portion, and wherein an anode of the fourth non-linear element is connected to the output portion, and a cathode of the fourth non-linear element is connected to the higher potential side reference potential. - View Dependent Claims (44, 45, 46, 47, 48)
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49. A rectifier comprising first to fourth non-linear elements, each of the first to fourth non-linear elements comprising:
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a first electrode provided over a substrate; an oxide semiconductor film provided on and in contact with the first electrode; a second electrode provided on and in contact with the oxide semiconductor film; a gate insulating film covering the first electrode, the oxide semiconductor film, and the second electrode; and a third electrode having a ring shape, the third electrode being provided in contact with the gate insulating film and adjacent to a side surface of the oxide semiconductor film, the third electrode surrounding the second electrode, and the third electrode being connected to the first electrode or the second electrode, wherein an anode of the first non-linear element is connected to a lower potential side reference potential, and a cathode of the first non-linear element is connected to an input portion, wherein an anode of the second non-linear element is connected to the input portion, and a cathode of the second non-linear element is connected to a higher potential side reference potential, wherein an anode of the third non-linear element is connected to the lower potential side reference potential, and a cathode of the third non-linear element is connected to an output portion, and wherein an anode of the fourth non-linear element is connected to the output portion, and a cathode of the fourth non-linear element is connected to the higher potential side reference potential. - View Dependent Claims (50, 51, 52, 53, 54)
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Specification