METHOD FOR PROTECTING ENCAPSULATED SENSOR STRUCTURES USING STACK PACKAGING
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Abstract
A method of protecting a micro-mechanical sensor structure embedded in a micro-mechanical sensor chip, in which the micro-mechanical sensor structure is fabricated with a protective membrane, the micro-mechanical sensor chip is arranged so that a surface of the protective membrane faces toward a second chip, and the micro-mechanical sensor chip is secured to the second chip.
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Citations
40 Claims
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1-20. -20. (canceled)
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21. A micro-mechanical sensor device, comprising:
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a first chip; and a micro-mechanical sensor chip having an embedded micro-mechanical sensor structure and a protective membrane arranged on a face of the embedded micro-mechanical sensor structure, wherein the micro-mechanical sensor chip is arranged directly onto a face of the first chip that faces and is parallel to the face of the embedded micro-mechanical sensor structure so that the protective membrane is arranged between the faces. - View Dependent Claims (22, 23, 24, 25, 26, 27, 28, 29)
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30. A method of protecting a micro-mechanical sensor structure embedded in a micro-mechanical sensor chip, comprising:
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fabricating the micro-mechanical sensor structure with a protective membrane; arranging the micro-mechanical sensor chip so that a surface of the protective membrane faces toward a second chip; and securing the micro-mechanical sensor chip to the second chip. - View Dependent Claims (31, 32, 33, 34, 35, 36, 37, 38, 39)
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40. A method of protecting a micro-mechanical sensor structure embedded in a micro-mechanical sensor chip, comprising:
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fabricating the micro-mechanical sensor structure with a sealing bond to surround the micro-mechanical sensor structure; arranging the micro-mechanical sensor chip so that a surface of the protective membrane faces toward a second chip; and securing the micro-mechanical sensor chip to the second chip.
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Specification