MEMS-BASED TUNABLE FILTER
First Claim
1. A filter device, comprising:
- a substrate;
a plurality of horizontal gap closing actuator (GCA) devices disposed on a first surface of said substrate, said plurality of GCA devices comprising one or more GCA varactors,wherein each one of said plurality of horizontal GCA devices comprises at least one drive comb structure, at least one input/output (I/O) comb structure, and at least one truss comb structure interdigitating said drive comb and said I/O comb structures, said truss comb structure configured to move along a motion axis between a first interdigitated position and at least a second interdigitated position based on a bias voltage applied between said truss comb structure and said drive comb structure.
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Accused Products
Abstract
A filter device is provided including a substrate (302) and a plurality of horizontal gap closing actuator (GCA) devices (550) disposed on a first surface of the substrate. The plurality of GCA devices includes and one or more GCA varactors (700). Each one of the plurality of horizontal GCA devices includes at least one drive comb structure (602a, 602b, 702a, 702b), at least one input/output (I/O) comb structure (616a, 676b, 716a, 716b), and at least one truss comb structure (604, 704) interdigitating the drive comb and the I/O comb structures. The truss comb structure is configured to move along a motion axis between at least a first interdigitated position and a second interdigitated position based on a bias voltage applied between the truss comb structure and the drive comb structure.
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Citations
23 Claims
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1. A filter device, comprising:
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a substrate; a plurality of horizontal gap closing actuator (GCA) devices disposed on a first surface of said substrate, said plurality of GCA devices comprising one or more GCA varactors, wherein each one of said plurality of horizontal GCA devices comprises at least one drive comb structure, at least one input/output (I/O) comb structure, and at least one truss comb structure interdigitating said drive comb and said I/O comb structures, said truss comb structure configured to move along a motion axis between a first interdigitated position and at least a second interdigitated position based on a bias voltage applied between said truss comb structure and said drive comb structure. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10)
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11. A filter bank, comprising:
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a substrate; one or more filter elements coupled to a common input node and a common output node, each of said filter elements comprising a plurality of horizontal gap closing actuator (GCA) devices disposed on a first surface of said substrate, said plurality of GCA devices comprising one or more GCA varactors, wherein each one of said plurality of horizontal GCA devices comprises at least one drive comb structure, at least one input/output (I/O) comb structure, and at least one truss comb structure interdigitating said drive comb and said I/O comb structures, said truss comb structure configured to move along a motion axis between at least a first interdigitated position and a second interdigitated position based on a bias voltage applied between said truss comb structure and said drive comb structure. - View Dependent Claims (12, 13, 14, 15, 16, 17, 18)
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19. A method of manufacturing a filter device, comprising:
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providing a substrate comprising a stack of layers, said stack comprising at least one base layer, at least one release layer on said base layer, and at least one structure layer on said release layer; depositing at least one electrically conductive layer on said structure layer; and forming a plurality of voids in said electrically conductive layer, said structure layer, and said release layer, wherein said plurality of voids define a plurality of patterned regions, said plurality of patterned regions defining a plurality of horizontal gap closing actuator (GCA) devices comprising one or more GCA varactors, each of said plurality of GCA devices comprising at least one drive comb structure, at least one input/output (I/O) comb structure, and at least one truss comb structure interdigitating said drive comb and said I/O comb structures, said plurality of voids in said release layer extending beneath said truss comb structure to allow said truss comb structure to move along a motion axis between at least a first interdigitated position and a second interdigitated position. - View Dependent Claims (20, 21, 22, 23)
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Specification