EXPOSURE APPARATUS AND DEVICE MANUFACTURING METHOD
First Claim
1. An exposure apparatus that exposes an object by irradiating the object with an energy beam, the apparatus comprising:
- a movable body, which holds the object, to which one end of a power usage transmitting member is connected, and which is movable along a first plane parallel to a predetermined two-dimensional plane that includes a first axis and a second axis orthogonal to each other, the power usage transmitting member having flexibility that forms a transmission path used when a power usage for the exposure is transmitted between the movable body and a predetermined external device; and
an auxiliary movable body, which is placed on one side in a direction parallel to the first axis with respect to the movable body, to which the other end of the power usage transmitting member is connected, and which moves along a second plane parallel to the two-dimensional plane according to movement of the movable body and moves to the other side in the direction parallel to the first axis when the movable body moves to the one side in the direction parallel to the first axis.
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Accused Products
Abstract
An exposure apparatus is equipped with a wafer stage which holds a wafer and to which one ends of flat tubes having flexibility that transmit the power usage for exposure between the wafer stage and a predetermined external device are connected and which is movable along an XY plane, and a tube carrier which is placed on one side of the wafer stage in an X-axis direction, to which the other ends of the flat tubes are connected, and which moves along the XY plane according to movement of the wafer stage and also moves to the other side in the X-axis direction when the wafer stage moves to the one side in the X-axis direction. Accordingly, the wafer stage hardly receives the drag (tensile force) from the flat tubes and outward protrusion of the flat tubes in the X-axis direction can be restrained.
23 Citations
8 Claims
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1. An exposure apparatus that exposes an object by irradiating the object with an energy beam, the apparatus comprising:
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a movable body, which holds the object, to which one end of a power usage transmitting member is connected, and which is movable along a first plane parallel to a predetermined two-dimensional plane that includes a first axis and a second axis orthogonal to each other, the power usage transmitting member having flexibility that forms a transmission path used when a power usage for the exposure is transmitted between the movable body and a predetermined external device; and an auxiliary movable body, which is placed on one side in a direction parallel to the first axis with respect to the movable body, to which the other end of the power usage transmitting member is connected, and which moves along a second plane parallel to the two-dimensional plane according to movement of the movable body and moves to the other side in the direction parallel to the first axis when the movable body moves to the one side in the direction parallel to the first axis. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8)
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Specification