3D atomic scale imaging methods
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Accused Products
Abstract
The present invention is directed generally toward atom probe and TEM data and associated systems and methods. Other aspects of the invention are directed toward combining APT data and TEM data into a unified data set. Other aspects of the invention are directed toward using the data from one instrument to improve the quality of concepts data obtained from another instrument.
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Citations
18 Claims
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1-2. -2. (canceled)
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3. A method of constructing a three-dimensional specimen image including the steps of:
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a. obtaining a Transmission Electron Microscopy (TEM) image of a TEM specimen, the TEM image containing data relating to the position of atoms within the TEM specimen; b. obtaining an Atom Probe Tomography (APT) image of an APT specimen, the APT image containing data relating to; (1) the position of atoms within the APT specimen, and (2) the composition of atoms within the APT specimen; c. generating a three dimensional image from the TEM image and the APT image, the three dimensional image depicting a specimen with atomic resolution. - View Dependent Claims (4, 5, 6, 7, 8, 9, 10, 11)
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12. A method of constructing a three-dimensional specimen image including the steps of:
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a. obtaining a Transmission Electron Microscopy (TEM) analysis of a TEM specimen; b. obtaining an Atom Probe Tomography (APT) analysis of an APT specimen; c. enhancing one of the TEM analysis and the APT analysis on the basis of the other analysis, wherein the enhanced analysis contains atoms having; (1) positions defined by one or more of the TEM analysis and the APT analysis, and (2) compositions defined by one or more of the TEM analysis and the APT analysis. - View Dependent Claims (13, 14, 15, 16, 17, 18)
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Specification