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VACUUM PUMP

  • US 20110103934A1
  • Filed: 07/14/2009
  • Published: 05/05/2011
  • Est. Priority Date: 07/14/2008
  • Status: Active Grant
First Claim
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1. A vacuum pump, comprising:

  • a casing provided with an inlet port and an outlet port;

    a stator portion provided inside the casing;

    a rotor portion having a shaft rotatably supported inside the casing, and a rotor disposed on the shaft and provided with a gas transfer mechanism that transfers a gas from the inlet port to the outlet port, the rotor portion being arranged with a predetermined clearance between the rotor portion and the stator portion;

    a motor rotating the shaft;

    vibration detection means for detecting vibration; and

    contact detection means for detecting an occurrence of contact between the stator portion and the rotor portion when, in the vibration detected by the vibration detection means, a specific vibration caused by contact between the stator portion and the rotor portion exceeds a predetermined threshold value.

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